Oct 10, 2018
Biomedical microfluidic devices are a class of miniaturized electronic devices that are assembled by integration of microfluidics, active sensors/transducers and the supporting signal processing electronics. The similarity of fabrication techniques for this class of devices to those of microelectronics not only allows researchers and engineers to leverage decades of microelectronics processing experience but also provides a rapid route to scale up for new technologies. The very first integrated devices were fabricated on silicon (Si) substrates followed by glass (SiO2) which brought some advantages. Today’s devices are hybrids that combine glass, silicon and various polymers like acrylic, resists, thermoplastics and several other novel nano-electronic and photonic materials. Semiconductor fabrication techniques provide the required economies of scale to make this technology cost-effective, maintaining precision and continued miniaturization and creating devices that remain functional over long-term use.