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5 products

UNIXX D30 Standard (Ø300mm) Stand-alone system provide users in science, and research with a productive, safe and clean system.
OSIRIS
UNIXX D20 Advanced (Ø200mm) Stand-alone system with movable splash ring for manual load-/unload of single substrates.
OSIRIS
VARIXX 1204 (Ø300mm) with 4 process modules
OSIRIS
VARIXX 806 (Ø200mm) with 6 process modules
OSIRIS
VARIXX 804 (Ø200mm) with 4 process modules
OSIRIS
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