Vacuum Pumps
NanoVac offers a wide range of vacuum pumps from Edwards Vacuum, including Rotary Vane, Scroll, Turbo, Multi-Stage Roots, Screw, Ion and semiconductor process vacuum pumps.
Edwards is a leading developer and manufacturer of sophisticated vacuum products, abatement solutions and related value-added services. Our products are integral to manufacturing processes for semiconductors, flat panel displays, LEDs and solar cells; are used within an increasingly diverse range of industrial processes including power, glass and other coating applications, steel and other metallurgy, pharmaceutical and chemical; and for both scientific instruments and a wide range of R&D applications.

Vacuum Pumps

Edwards TAG Turbo & Active Gauge Controller, 24 VDC for all DX and nEXT turbo pumps, with power...
-13%
Edwards T-Station 85 Turbo Dry Pumping Station, KF40 (TS85D1001)
T-Station 85 is a low cost, compact turbomolecular pumping station that seamlessly combines the nEXT85H turbomolecular pump with...
The new Edwards nEXT-400DX hybrid bearing compound turbomolecular vacuum pumps, operates on 24 to 48 VDC, 80 Watt version, for...
The new Edwards nEXT-240D hybrid bearing compound turbomolecular vacuum pumps, operates on 24 to 48 VDC, 80 Watt version,...
The Edwards EXT75DX is a hybrid bearing compound turbo pump that combines the proven technology of a ceramic...
$10,298.98 $8,999.00
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