Vacuum Pumps
NanoVac offers a wide range of vacuum pumps from Edwards Vacuum, including Rotary Vane, Scroll, Turbo, Multi-Stage Roots, Screw, Ion and semiconductor process vacuum pumps.
Edwards is a leading developer and manufacturer of sophisticated vacuum products, abatement solutions and related value-added services. Our products are integral to manufacturing processes for semiconductors, flat panel displays, LEDs and solar cells; are used within an increasingly diverse range of industrial processes including power, glass and other coating applications, steel and other metallurgy, pharmaceutical and chemical; and for both scientific instruments and a wide range of R&D applications.

Vacuum Pumps

With exceptional pumping capability, ultimate vacuum performance and state-of-the-art design features Edwards nXDS is the best performing pump in its...
With exceptional pumping capability, ultimate vacuum performance and state-of-the-art design features Edwards nXDS is the best performing pump in its...
Chemical resistant Scroll Vacuum Pump with exceptional pumping capability, ultimate vacuum performance and state-of-the-art design features Edwards nXDS is the best...
Chemical resistant Scroll Vacuum Pump with exceptional pumping capability, ultimate vacuum performance and state-of-the-art design features Edwards XDS is the best...
Chemical resistant Scroll Vacuum Pump with exceptional pumping capability, ultimate vacuum performance and state-of-the-art design features Edwards nXDS is the best...
Chemical resistant Scroll Vacuum Pump with exceptional pumping capability, ultimate vacuum performance and state-of-the-art design features Edwards nXDS is the best...
Chemical resistant Scroll Vacuum Pump with exceptional pumping capability, ultimate vacuum performance and state-of-the-art design features Edwards nXDS is the...
Scroll pumps use intermeshing fixed and orbital scrolls to form non-contacting, crescent-shaped gas pockets that are continuously compressed...
These OEM Edwards major service kits Includes front angular contact bearings, shaft end cap, washers, screws, plugs and...
Genuine OEM Edwards nXDS dry scroll pump Tip Seal Service Kit. Suitable for Edwards nXDS6i, nXDS10i, nXDS15i, nXDS20i,...
Scroll pumps use intermeshing fixed and orbital scrolls to form non-contacting, crescent-shaped gas pockets that are continuously compressed...
With exceptional pumping capability, ultimate vacuum performance and state-of-the-art design features Edwards nXDS is the best performing pump in its...
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