Lithography Processing Equipment

UNIXX SP B20 (Ø200mm) Bench mounted spray coater module

UNIXX SP H22 (Ø200mm) Spray coater system with hotplate module.

UNIXX SP 760 (21x21 inch) Spray coater system with integrated heating chuck for large substrates.

UNIXX HpT20 (Ø200mm) Table-top hotplate tool with pneumatic driven lifting pins. (or bench mounted)

UNIXX HeT20 (Ø200mm) Table-top hotplate tool with electronic driven lifting pins. (or bench mounted)

UNIXX HvA20 (Ø200mm) Stand-alone hotplate system for HMDS priming and vacuum dehydration bake. (available as table-top or bench mounted)

UNIXX He45 (Ø450mm) Stand-alone hotplate system for round or up to 320 x 320mm square substrates.

UNIXX H760 (21x21 inch) Stand-alone hotplate system up to 537 x 537mm or customized rectangular substrates.

UNIXX H1403 (40x40 inch) Stand-alone hotplate system with 3 hotplate modules up to 1.000 x 1.000mm substrates.

UNIXX EBR A20 (200x200mm) Stand-alone smartEBR system.(single base frame)

UNIXX D30 Standard (Ø300mm) Stand-alone system provide users in science, and research with a productive, safe and clean system.

UNIXX D20 Advanced (Ø200mm) Stand-alone system with movable splash ring for manual load-/unload of single substrates.

UNIXX SHp22 (Ø200mm) Stand-alone system with open bowl spin coater & hotplate module.

UNIXX SA30(Ø300mm) Stand-alone system with open bowl spin coater. (single base frame)

UNIXX SHp22+ (Ø200mm) Stand-alone system with covered chuck spin coater & hotplate module.

UNIXX SA30+ (Ø300mm) Stand-alone system with covered chuck spin coater. (single base frame)

UNIXX S760+ (21x21 inch) Stand-alone system spin coater for large substrates.

VARIXX 1204 (Ø300mm) with 4 process modules

VARIXX 806 (Ø200mm) with 6 process modules

VARIXX 804 (Ø200mm) with 4 process modules