Physical Vapour Deposition

9 products

    Nano Vacuum offers flexible, modular PVD (Physical Vapour Deposition) systems for high-quality R&D and pilot-scale production. Our systems provide superior high-vacuum coating performance. All systems have modular designs, providing the flexibility to address a huge range of customer requirements.
    The range contains several platforms, with each having a distinct chamber volume and shape. While all chambers are built to the same high standards, larger chambers allow for more techniques and flexibility than their smaller counterparts.
    In addition to thin-film deposition, our systems can also be fitted with complementary techniques such as ion beam sources, etching components and annealing stages.
    We specialise in custom solutions! Call us to discuss your needs today. 

    Techniques:
    Nano Vacuum tools can be fitted with all major PVD techniques:

    • Electron-beam (‘e-beam’) evaporation: Ultra-high temperature evaporation of metals and non-metals such as dielectrics
    • Low-temperature thermal evaporation (LTE): Controlled low temperatures for evaporation of volatile materials, typically organic compounds
    • Standard thermal evaporation: Evaporation of metals from resistively heated filaments and boats
    • High-temperature thermal evaporation: High-current resistive evaporation of metals and non-metals
    • Magnetron sputtering: Focussed plasma sputtering of metal and non-metal targets

    It is possible to fit multiple techniques on-board a single system.
    We also offer a variety of substrate stage options (heating; cooling; bias; etching; rotation; etc.), and can incorporate most third-party vacuum components.
    For more information contact us today.

    9 products
    Nano Vacuum Australia & New Zealand MiniLab 080 Physical Vapour Deposition System
    MiniLab 080 Modular PVD System
    Moorfield Nanotech
    nanoPVD S10A-WA - Benchtop Sputtering 8" Substrates - Nano Vacuum Australia & New Zealand
    nanoPVD S10A-WA - Benchtop Sputtering 8" Substrates
    Moorfield Nanotech
    nanoPVD T15A - Benchtop Thermal Evaporator - Nano Vacuum Australia & New Zealand
    nanoPVD T15A - Benchtop Thermal Evaporator
    Moorfield Nanotech
    anoPVD S10A - Benchtop Sputtering PVD System - Nano Vacuum Australia & New Zealand
    nanoPVD S10A - Benchtop Sputtering PVD System
    Moorfield Nanotech
    Nano Vacuum Australia & New Zealand MiniLab 060 Multi-Technique Physical Vapour Deposition System
    MiniLab 060 Modular PVD System
    Moorfield Nanotech
    Perovskite Solar Cell Modular Thin Film Deposition System - Nano Vacuum Australia & New Zealand
    MiniLab 090 Modular PVD System
    Moorfield Nanotech
    Nano Vacuum Australia & New Zealand MiniLab 125 Physical Vapour Deposition System
    MiniLab 125 Modular PVD System
    Moorfield Nanotech
    Perovskite Solar Cell Thin Film Deposition Tool - Nano Vacuum Australia & New Zealand
    MiniLab 026 Modular PVD System
    Moorfield Nanotech
    nanoDEP Physical Vapour Deposition (PVD)
    Boson

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