PVD Systems

Moorfield Nanotechnology UK offers flexible, modular PVD (Physical Vapour Deposition) systems for high-quality R&D and pilot-scale production. Moorfield systems provide superior high-vacuum coating performance. All systems have modular designs, providing the flexibility to address a huge range of customer requirements.
The range contains several platforms, with each having a distinct chamber volume and shape. While all chambers are built to the same high standards, larger chambers allow for more techniques and flexibility than their smaller counterparts.
In addition to thin-film deposition, Moorfield systems can also be fitted with complementary techniques such as ion beam sources, etching components and annealing stages.
We specialise in custom solutions! Call us to discuss your needs today. 

Techniques:
Moorfield tools can be fitted with all major PVD techniques:

  • Electron-beam (‘e-beam’) evaporation: Ultra-high temperature evaporation of metals and non-metals such as dielectrics
  • Low-temperature thermal evaporation (LTE): Controlled low temperatures for evaporation of volatile materials, typically organic compounds
  • Standard thermal evaporation: Evaporation of metals from resistively heated filaments and boats
  • High-temperature thermal evaporation: High-current resistive evaporation of metals and non-metals
  • Magnetron sputtering: Focussed plasma sputtering of metal and non-metal targets

It is possible to fit multiple techniques on-board a single system.
We also offer a variety of substrate stage options (heating; cooling; bias; etching; rotation; etc.), and can incorporate most third-party vacuum components.
For more information contact us today.

PVD Systems

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MiniLab 080 systems offer tall chambers ideally suited for thermal, LTE and e-beam evaporation techniques requiring longer working...
The nanoPVD-S10A-WA is a Wide-Area configuration that extends the capabilities of the nanoPVD-S10A to allow for even coating...
High-performance organics and metals evaporation in compact packages for benchtop location. Superior, efficient performance and ideal for OLED,...
Benchtop, turnkey system for high performance RF and DC magnetron sputtering for metals and insulating materials. Compact as...
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MiniLab 026 systems are compact floor standing vacuum evaporators with easy-access 'clam-shell' chambers. Suitable for metal, dielectric and...
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The most popular platform in our MiniLab range, MiniLab 060 systems have front-loading box-type chambers ideal for multiple-source...
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MiniLab 090 systems are glovebox-compatible for atmosphere-sensitive applications. Tall chambers are ideal for high-performance evaporation, but magnetron sputtering...
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MiniLab 125 tools take the modular concept to the pilot-scale level. Large chambers allow for increased-size component sets...
The nanoEM system is the first electron microscopy (EM) coating tool with a full research-grade feature set. The...
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