VARIXX 1204 (Ø300mm) with 4 process modules

OSIRIS SKU: VARIXX 1204
VARIXX 1204 
(Ø300mm) with 4 process modules

VARIXX 1204 (Ø300mm) with 4 process modules

OSIRIS SKU: VARIXX 1204
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VARIXX-SERIES

  • Flexible configuration of processing modules
  • Available modules: spin coater, developer, temperature and smart-EBR
  • Handling thin, standard or bonded wafer (Si, glass & others)
  • Round wafer up to Ø300 mm (Ø12 inch)
  • Square substrates size up to 230 x 230 mm (9 x 9 inch)
  • Optional sub-systems; wafer flipper, PR dispense system (pumps, syringe, CPD) and media supply cabinets with various canister designs.

    Designed to be used in applications: SPIN (SPRAY) COATING, DEVELOPING, BAKING & COOLING AND EBR

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