UNIXX SP 760 (21x21 inch) Spray coater system with integrated heating chuck for large substrates.

OSIRIS SKU: UNIXX SP 760
UNIXX SP 760
(21x21 inch) Spray coater system with integrated heating chuck for large substrates.

UNIXX SP 760 (21x21 inch) Spray coater system with integrated heating chuck for large substrates.

OSIRIS SKU: UNIXX SP 760
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UNIXX-SERIES
  • Spin & spray coater, developer, temperature and smartEBR modules are available as stand-alone, table-top or bench mounted configurations.
  • Base frame design allows various process modules configurations.
  • Round wafer up to Ø300 mm (Ø12 inch)
  • Square substrate size up to 230 x 230 mm (9 x 9 inch)

The product range also offers customized single processing systems for large substrates up to 1.300 x 1.300 mm (51 x 51 inch). Optional sub-systems; PR dispense systems (pumps, syringe or CPD).

HOTPLATES

SPRAY COATER Designed to be used in applications: SPRAY COATING for all topographies and shapes.

3D & 2D SPRAY COATER SYSTEM for flat, concave or convex surfaces

  • For large scale optical devices and substrates up to 21‟x 21‟
  • 6 axis robot system & up to 2 ultra-sonic spray nozzles
  • Integrated heating chuck under the spray coating area
SPRAY COATER MODULE for surfaces with topographic structure
  • Wafer size up to Ø 300 mm (Ø12‟)
  • Module can be installed in automatic systems
Optional sub-systems; PR dispense systems (pumps and syringe).

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