Residual Gas Analyzers With Integrated Pirani & Ion Gauge

Brand: Extorr

Product Code: RGA

Availability: On Request

The Extorr XT residual gas analyzer is a quadrupole mass spectrometer complete with a built-in Pirani gauge and Ion gauge. It is an essential measuring device which may be used in any vacuum system. The Extorr XT residual gas analyzer (RGA) models come in 100, 200 and 300 amu packages. All RGA models attach to a single 2 3/4 inch flange. Each package has automatic start-up and shut down and will constantly monitor from atmospheric pressure to ultra high vacuum. The built-in Pirani gauge and ion gauge constantly monitor total pressure and regulate and protect the RGA. These functions are seamlessly integrated into the Extorr software package.

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Mass range

         XT100 1 to 100 amu Faraday cup (FC)
         XT200 1 to 200 amu Faraday cup (FC)
         XT300 1 to 300 amu Faraday cup (FC)
         XT100M 1 to 100 amu Faraday cup (FC) and Electron Multiplier (EM)
         XT200M 1 to 200 amu Faraday cup (FC) and Electron Multiplier (EM)
         XT300M 1 to 300 amu Faraday cup (FC) and Electron Multiplier (EM)

Mass filter type


Detector type

Faraday cup (FC), Standard Electron Multiplier (EM), Optional


Better than 0.5 amu @ 10% peak height. Adjustable to constant peak width throughout the mass range.

Sensitivity (A/Torr)

5 x 10-4 into Faraday cup. Measured with N2 @ 28 amu with 1 amu full peak width, 10% height, 70 eV electron energy, 6 eV ion energy and2 mA electron emission.

Minimum detectable
partial pressure

Measured with N2 @ 28 amu with 1 amu full peak width, 10% height,  70eV     electron energy, 6 eV ion energy, and 2 mA electron emission.
Faraday cup 5 x 10-12
Electron multiplier 5 x 10-14

Operating range

UHV to Atmosphere
Pirani gauge 10-3 Torr to ATM
Ion Gauge operation below 10-2 Torr
Partial Pressures operation below 10-4 Torr

Operating temperature

50 °C Electronics, 100 °C Probe

Bakeout temperature

300 °C (Probe only, CCU removed)

Total pressure

Pirani gauge 10-3 Torr to ATM
Ion Gauge 2 x 10-10 Torr to 10-2 Torr

Probe Materials

SS304, Kovar, Tungsten, Alumina, Iridium, Copper, Nickel, Thoria, Platinum

Ionizer Design

Open ion source, electron impact ionization


Dual thoria coated iridium with firmware protection. Built-in 1 to 30W degas ramp-up. Field replaceable.

Electron energy

11 to 150V, programmable

Ion energy

1 to 12V, programmable

Focus Voltage

0 to 150V, programmable

Electron emission

0.1 to 4 mA, programmable

Probe Dimensions

6.8” from flange face to top of ionizer

Probe mounting

2.75” CF

Minimum tube I.D.


CCU Dimensions

3.3” x 4.8” x 7.4”, Easily separated from probe for bakeout.

CCU Extension 

6.2” from flange face with mounting hardware.

Warm-up time

Mass stability ± 0.1 amu after 30 minutes.

Computer Interface

RS-232C, up to 115,200 baud, or USB.

Minimum PC

PC running Windows 2000, XP, 7, 8, or 10 with 1024 x 768 VGA graphics, keyboard, mouse, CD ROM Drive, and 1 Unused USB or RS-  232C Port.


Included VacuumPlus Windows based application.

Power requirement

24 VDC @ 2.5 Amps. 120/240 VAC adaptor included.


9 lbs. Total, Probe and CCU.