The Most Powerful ALD System Arradiance offers!
Leveraging the extremely successful and proven performance
of GEMStar XT , this system provides a highly configurable modular platform to meet your needs and requirements, today and well into the future.
The ALD Powerhouse delivers next generation coating solutions for:
- Semiconductors & Packaging
- Energy Storage & Conversion
- Advanced Optics
- MEMS & 3D Sensors
- Biomedical Devices
- Quantum & Photonic Materials
- Flexible Electronics and Sensors
Key System Features
- Up to 15 Sources
- Improved reactor and precursor delivery thermal uniformity and with increased process control
- Increased capability with handling low volatile precursors
- Intuitive multi-level heads-up Graphical User Interface (GUI)
- Next generation safety protocols protecting the system and operators
- Single substrate and batch operation up to 200mm or M12 substrates and 3D objects
- Field reconfigurable as your needs change
Specifications
| System Dimensions |
36.72”x 65.25”x 74.78” |
| Usage |
Production & R&D Scale-Up |
|
Chamber Volume |
Up to QTY 20 - 200mm wafers or 210 x 210mm panels |
|
Substrate Types |
2D (Wafers) & 3D (Particles & Objects) |
|
Precursor Material Supported |
Inorganics & Organics |
|
Precursor Sources |
Up to four or six (2 STD) DOT certified 150 ML Bottles with bellows sealed valves |
|
Extremely Low Vapor Pressure |
Yes |
|
Pressure Control |
Yes |
|
Cooling |
Air-Cooled (No Chilled Water required) |
| Metrology Port | Spare KF-40 In Line metrology port for QCM |
|
Integration |
Standalone or Glovebox |
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