MPO 100 - Multi-User Tool for 3D Lithography and 3D Microprinting

MPO 100 - Multi-User Tool for 3D Lithography and 3D Microprinting
Metastructures with feature sizes below the diffraction limit can be fabricated in a single process step.
3D structures for diverse applications such as optics, mechanics, and life science can be fabricated at high speed.
High quality microoptical elements with varying shapes (e.g. freeform) and sizes can be fabricated either on planar substrates or directly on active/passive devices.
3D scaffold structures for biomedical applications such as implants in regenerative medicine.
MPO 100 - Multi-User Tool for 3D Lithography and 3D Microprinting

MPO 100 - Multi-User Tool for 3D Lithography and 3D Microprinting

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The MPO 100 is a Two-Photon Polymerization (TPP) multi-user tool for 3D Lithography and 3D Microprinting of microstructures with applications in Optics, Photonics, Mechanics, and Biomedical Engineering. The modular 3D printing platform MPO 100 offers high precision on demand for 3D Lithography as well as high print volume for 3D Microprinting and enables production of complex functional microstructures with high throughput in a single process step.

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MPO 100 HIGHLIGHTS: 1 - 10 - 100 - 1000

  • Printing height of over 1 cm
  • Surface quality: Roughness down to 10 nm
  • Resolution down to 100 nm
  • Scan speeds over 1000 mm/s
  • Flowbox with temperature control down to ± 0.1 °C
  • Print area of 100 mm x 100 mm
  • Stitching-free fabrication capability
  • Synchronized scanning system
  • Application-specific Write Modes
  • Additive processing of organic and hybrid polymers (ORMOCER®s)
  • Optional software modules for customer-specific print jobs
  • Subtractive processing of metal layers (Au, Ag, Cr, ...)


The scanning system of the MPO 100 consists of high-performance, frictionless air bearing stages that are synchronized with the high-speed galvoscanner. This enables a simultaneous movement of the sample and a deflection of the laser spot, thereby expanding the scan field (Field-of-View, FoV) of the microscope objective to the entire print area of 100 mm x 100 mm and thus provides the capability of stitching-free fabrication (infinite FoV). The ultrafast scanner facilitates high scan speeds based on the relation 10 m/s divided by the objective‘s magnification. Due to the high dynamic of the scanner, optimum scan speeds of over 1000 mm/s can be achieved.

LithoSoft3D and LithoStream – Ultimate 3D Lithography Software Solution

The MPO 100 includes the software package of LithoStream and LithoSoft3D as standard.

LithoProf3D®-GSII World’s first modular 3D lithography system - Nano Vacuum Australia & New Zealand


LithoStream is the MPO 100 control software. It provides unique features like printing time estimation, triangulation, process camera, alignment, print job creator, and application programming interface (API). Printing parameters can be saved into a data base and printing recipes can be loaded.


    LithoSoft3D is the code preparation software. It includes powerful modules to handle and to process application specific design formats such as stl- or bitmap files with advanced stitching options. Depending on the user‘s requirements, different trajectory modes can be chosen like full volume scan, contour scan, or the combined contour hatch scan as well as the unique LCON3D (real 3D Laser CONtouring). The interplay between LithoSoft3D and LithoStream is based on a vector based virtual GCode (VGC) architecture that allows for modifications of the printing parameters at the machine level (e.g. triangulation, laser power, scan speed).

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