The HVA pneumatically operated CF flange series of standard cycle gate valves provide compatibility with UHV systems when pressure ranges approximate 1 x 10-10 mbar and higher bakeout temperatures of 200°C are required. Supplied with 24V DC Actuator Normally Closed.
Specifications
- Vacuum Leak Rate UHV <5x10-10 mbar l/s
- Size or DN DN100CF (6” OD flange)
- Vacuum Seal Viton O Ring Metal Bonnet
- Body Material Stainless Steel
- Temperature Range Open 200°C, Closed 150°C
- Inside Diameter 101.6
- Thickness 75.4
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