DFL7341 Fully Automatic Laser Saw

DISCO SKU: DFL7341
DFL7341 Fully Automatic Laser Saw

DFL7341 Fully Automatic Laser Saw

DISCO SKU: DFL7341
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Achieves high productivity for sapphire, lithium tantalate, and MEMS processing

  • Φ200 mm
  • Stealth Dicing™
  • SDBG
  • SDTT
  • DFL7341 is a fully automatic laser saw for Φ8-inch wafers which has seen wide used in applications such as LED sapphire substrates and silicon microphones.
  • Stealth Dicing™ process makes it possible for brittle materials such as SiC and GaN to be singulated without chipping.
  • This is a completely dry process, making it suitable for processing devices such as MEMS that are susceptible to water damage.


Height adjustment function

Stealth Dicing™ process can be performed based on the wafer surface height, making it possible to reliably process wafers with significant warpage.

 

Wafer shape recognition

Wafer shape is measured using a high-resolution sensor to singulate at the optimal processing area.

 

Compatibility with various materials

High-quality processing can be achieved for sapphire, SiC, and GaAs using laser oscillators suited for each material.


DISCO is an alliance partner* of Hamamatsu Photonics, which owns the portfolio of patents for Stealth Dicing technology.

*System integrators who are business partners with comprehensive licensing for the portfolio of patents for Hamamatsu Stealth Dicing technology.
https://www.hamamatsu.com/jp/en/product/semiconductor-manufacturing-support-systems/stealth-dicing-technology/alliance-partners.html

Specifications

Specification Unit
Processing method - Stealth Dicing™
Max. workpiece size mm Φ200
X-axis
(Chuck table)
Processing range mm 210
Moving speed mm/s 1 ~ 1,000
Y-axis
(Chuck table)
Processing range mm 210
Index step mm 0.0001
Positioning accuracy mm 0.003/210
(Single error)0.002/5
Z-axis Moving resolution mm 0.0001
Repeatability accuracy mm 0.001
θ-axis
(Chuck table)
Max. rotating angle deg 380
Equipment dimensions (W×D×H) mm 950 × 1,732 × 1,800
Equipment weight kg Approx. 1,800

*Product appearance, features, specifications, and other details may change due to technical modifications.
*Please read the standard specification sheet thoroughly before use.

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