Ultra-compact Dual Spindle Dicing Saw Which Achieves Increased Processing Stability
- Φ200 mm
- Facing dual spindle
Small footprint
The optimal design of the DAD3651 combines high functionality and ultra compactness for a dual-spindle automatic dicing saw giving it a footprint 2/3 the size of the widely used single-spindle DAD3350 dicer for ø8-inch wafers.
High throughput
By dicing with 2 spindles simultaneously in dual cut mode, high throughput of as much as twice that of a single-spindle dicer can be achieved.
High processability
DAD3651 achieves a small footprint while continuing to support the processing of workpieces up to Φ8 inches. This equipment also supports large square workpieces up to 250 mm with the addition of a user-specified specification. Also, by mounting a different blade on each spindle and using step cut to dice in 2 stages, it is possible to process workpieces requiring very high quality.
High-rigidity spindle
Includes a 1.8 kW spindle with high rigidity, which further improves the processing stability.
Enhanced ease of use
By adopting a 19-inch LCD touch panel, it is possible to operate the equipment and check the equipment and blade conditions at the same time. The operator’s labor load is reduced using the auto alignment function as a standard specification in addition to providing basic access for operation, replacement of workpieces and blades, etc. on the front side of the equipment.
Specifications
| Specification | Unit | ||
|---|---|---|---|
| Max. workpiece size | - | Φ8 inch (250 mm × 250 mm, Φ300 mm user-specified specification) | |
| X-axis | Cutting range | mm | 260 |
| Cutting speed | mm/s | 0.1 ～ 1,000 | |
| Y-axis | Cutting range | mm | 260 |
| Index step | mm | 0.0001 | |
| Index positioning accuracy | mm | 0.002/260 (Single error) 0.002/5 |
|
| Z-axis | Max. stroke | mm | 32.2 |
| Moving resolution | mm | 0.0000002 (0.2 nm) | |
| Repeatability accuracy | mm | 0.001 | |
| θ-axis | Max. rotating angle | deg | 320 |
| Spindle | Rated output | kW | 1.8 |
| Rated torque | N・m | 0.29 | |
| Rotation speed range | min‐1 | 6,000 ～ 60,000 | |
| Equipment dimensions(W×D×H) | mm | 790 × 790 × 1,800 | |
| Equipment weight | kg | Approx. 1,040 | |
*Product appearance, features, specifications, and other details may change due to technical modifications.
*Please read the standard specification sheet thoroughly before use.
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