DAD3351 Automatic Dicing Saw
Highly expandability to support various processing needs
- Φ200 mm
- Single spindle
Supports a wide range of applications
DAD3351 is a semi automatic dicing saw compatible with Φ8-inch workpieces. Includes a high output 1.8 kW spindle as standard. Also, using a high torque, high rigidity 2.2 kW spindle (optional), difficult-to-process materials including silicon and ceramics can be processed. Through a user-specified specification, blades up to Φ5 inches can be used for processing. As a result, it is possible to process workpieces with thicknesses of 10 mm or more. Supports blades up to Φ5 inches with user-specified specification. In addition, the multi-alignment function is available as an option.
Stable processing quality
Adopted high bridge-type frame structure and moved the spindle support structure forward to minimize the effects of thermal expansion and vibration, providing a more stable processing point. In addition, a spindle temperature sensor was installed for temperature monitoring.
Processing Time Reduction
Processing time is decreased up to 5% compared to the existing equipment through axis-speed improvement by adopting servo motors for all axes and optimizing the control parameters.
Improved functions and operation
The high-speed, high-accuracy NCS (Non-Contact Setup, optional) reduces blade height measurement time for the processing table by 74%. Further processing quality stabilization is achieved through improved measurement accuracy. In addition, the visibility during kerf check was improved by enabling microscope ring light three-channel switching. This model supports SECS/GEM.
- XIS (Extended Interface System)
Operation buttons consolidated on microscope screens
- Wafer mapping
Graphic processing condition display similar to full automation equipment
- Log viewer
Graphic analog data display and equipment data visualization
- Help viewer
Displays instructions when error occurs for quick, accurate recovery.
- Enhancement of Dust Prevention Performance on X-, Y-, and Z-axes.
Effective for materials including ceramics where contamination is likely to damage the shaft.
|Specification||Unit||1.8 kW||2.2 kW (Option)||2.2 kW (Option)
|Max. workpiece size||-||Φ8 inch (250 mm × 250 mm user-specified specification)|
|X axis||Cutting range||mm||260|
|Cutting speed||mm/s||0.1 ～ 1,000|
|Index positioning accuracy||mm||0.002/260
(Single error) 0.002/5
|Moving resolution||mm||0.0000002 (0.2 nm)|
|θ-axis||Max. rotating angle||deg||320
Θ axis rotation specification 380°(option):382.5
|Spindle||Rated output||1.8 at 60,000 min-1||2.2 at 30,000 min-1||2.2 at 15,000 min-1|
|Rotation speed range||min‐1||6,000 ～ 60,000||3,000 ～ 30,000||3,000 ～ 15,000|
|Equipment dimensions(W×D×H)||mm||880 × 1,000 × 1,800|
|Equipment weight||kg||Approx. 1,100|
*Product appearance, features, specifications, and other details may change due to technical modifications.
*Please read the standard specification sheet thoroughly before use.