DAD324 Automatic Dicing Saw

DAD324 Automatic Dicing Saw

DAD324 Automatic Dicing Saw

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6-inch Compact Dicing Saw which Achieves World’s Smallest Footprint while Improving Functionality

  • Φ150 mm
  • Single spindle

Support for a variety of applications from semiconductor wafers to electronic parts

DAD324 is a single-axis dicing saw which is compatible with workpieces up to Φ6 inches with a 2.0 kW high-torque spindle. 150 x 150 mm workpieces can be processed using a user-specified specification.

High productivity

Software operation speed and response speed are improved through adoption of a high performance MCU. The axis speed is accelerated and throughput is improved by adopting servo motors for all axes. In addition, this model uses PC electric components as standard and supports communication control as an option. The high-speed NCS (Non-Contact Setup) reduces measurement time.

Current(DAD322) DAD324
X-axis 500 800
Y-axis 150 200
Z-axis 30 80


World’s smallest footprint*

Compact design with a width of 490 mm
he reduced profile contributes towards a large increase in terms of productivity per unit area, especially when multiple.

* Investigated internally

Ease of operation

  • XIS (Extended Interface System)
    Operation buttons are consolidated on the microscope screen.
  • Wafer mapping
    The processing status is displayed visually in the same way as fully automatic equipment.
  • Log viewer
    Analog data is displayed in a graph and equipment data is more easily visualized.
  • Help viewer
    Troubleshooting is displayed when an error occurs to achieve quick and accurate recovery support.
  • Automatic alignment
  • Autofocus
  • Automatic kerf check
Wafer mapping
Wafer mapping
Log viewer
Log viewer
Help viewer
Help viewer


Specification Unit
Max. workpiece size - Φ6 inch/150 × 150 mm (user-specified specification)
X-axis Cutting range mm 160
Cutting speed mm/s 0.1 - 800
Y-axis Cutting range mm 162
Index step mm 0.0001
Index positioning accuracy mm 0.005/160
(Single error)0.003/5
Z-axis Max. stroke mm 32.2
Moving resolution mm 0.000002(2nm)
Repeatability accuracy mm 0.001
θ-axis Max. rotating angle deg 320
Spindle Rated output kW 2.0 at 40,000 min-1
Rated torque N・m 0.48
Rotation speed range min‐1 3,000 - 40,000
Equipment dimensions(W × D × H) mm 490 × 870 × 1,670
Equipment weight kg Approx. 420

*This model supports blades with an outer diameter of 55.56 mm and processing for max. 1.2 mm thick workpieces.
*Product appearance, features, specifications, and other details may change due to technical modifications.
*Please read the standard specification sheet thoroughly before use.

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