DN100CF XYZ MANIPULATOR WITH 4 x DN16CF PORTS, 100mm Z TRAVEL

• XY travel of ±12.5 mm guided with cross roller bearings. • Bakeable to 200°C. • Standard base flange is 152mm OD (NW100CF) with straddled clearance holes for mounting the translator. • Four mini ports, tapped M4, are provided for service feedthroughs (152mm OD base flange only) • Travelling flange 70mm OD (NW35CF) with M6 tapped holes, straddled about the Y axis • Double bolt holes on mounting flange. • Operating pressure 1 bar to 10-11 mbar • Leak rate 1x10-10 mbar ls-1 • XY Resolution 0.001 mm repeatability 0.005 mm • Z Resolution 0.005 mm repeatability 0.010 mm

Specifications

• Size or DN DN100CF Base flange with 4 x DN16CF ports
• Temperature Range Bakeable to 200°C
• Dimension A 160mm to 210mm
• Dimension C 301mm
• Travel 100mm Z