Adopted an air slide on the X-axis to support high precision processing needs
- Φ150 mm
- Single spindle
Able to support wide range of applications
Supports workpieces up to Φ6-inch or 150 X 150 mm with user-specified specification. In addition, the standard 2.0 kW high torque spindle enables processing of difficult-to-process materials.
The structure includes a wide water case for a longer X-axis stroke.
Able to support high precision / high quality processing
X-axis adopts a structure that makes use of the air slider characteristics to achieve improved straightness.
In addition, a linear scale mounted on the Y-axis as standard enables stable axis control and higher positioning accuracy. This supports fine processing needs which require high accuracy, including optical parts and magnetic head cutting and grooving.
Improved throughput
High Z-axis feed speed
Improved functions and operation
The high-speed, high-accuracy NCS (Non-Contact Setup, optional) reduces blade height measurement time for the processing table by 74%. Further processing quality stabilization is achieved through improved measurement accuracy. In addition, the visibility during kerf check was improved by enabling microscope ring light three-channel switching. This model supports SECS/GEM.
Easy operation
- XIS (Extended Interface System)
Operation buttons consolidated on microscope screens - Wafer mapping
Graphic processing condition display similar to full automation equipment. - Log viewer
Graphic analog data display and equipment data visualization - Help viewer
Displays instructions when error occurs for quick, accurate recovery.
High maintainability
Installation of microscope lens shutter and scope blow function reduces maintenance frequency while improving equipment operation ratio.
Specifications
| Specification | Unit | ||
|---|---|---|---|
| Max. workpiece size | - | Φ6 inch (150 mm × 150 mm, 220 mm × 160 mm user-specified specification) | |
| X-axis | Cutting range | mm | 160 |
| Cutting speed | mm/s | 0.1 ～ 300 | |
| Y-axis | Cutting range | mm | 162 |
| Index step | mm | 0.0001 | |
| Index positioning accuracy | mm | 0.0015/160 (Single error) 0.0005/5 |
|
| Z-axis | Max. stroke | mm | 32.2（Φ2" blade） |
| Moving resolution | mm | 0.000002 (2 nm) | |
| Repeatability accuracy | mm | 0.001 | |
| θ-axis | Max. rotating angle | deg | 320 |
| Spindle | Rated output | kW | 2.0 at 40,000 min-1 |
| Rated torque | N・m | 0.48 | |
| Rotation speed range | min‐1 | 3,000 ～ 40,000 | |
| Equipment dimensions(W×D×H) | mm | 730 × 900 × 1,670 | |
| Equipment weight | kg | Approx. 600 | |
*Product appearance, features, specifications, and other details may change due to technical modifications.
*Please read the standard specification sheet thoroughly before use.
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