How To Plasma Etch Silicon Carbide (SiC) To Achieve Maximum Device Performance
by Sarah Bowles
Dr Mark Dineen, technical marketing manager at Oxford Instruments has more than 20 years of experience in plasma technologies including ALD, ALE, CVD, ICP, PECVD and RIE processing. In this webinar by Oxford Instruments Plasma Technology, Mark shares his experiences on efficient plasma etching techniques to achieve deep SiC vias.
Silicon Carbide (SiC) is becoming well established within power device manufacturers as it offers compelling advantages vs Si in several applications.
Manufacturing SiC devices require expert knowledge of plasma processing techniques in order to maximise device performance, watch this webinar to discover more about these techniques.
This webinar covers:
- How to achieve precision features on SiC surfaces
- Fast and efficient plasma etching techniques to achieve deep SiC vias
More from:
Oxford Instruments Plasma Technology
Share this
Explore more
- 032 PRIMS
- 2D Material
- 2D materials
- 3D printing
- 7th South Australia Space Forum
- adhesion
- adhesive bonding
- Aerospace
- AFM
- ALD
- angle etch
- Apiezon
- atomfab
- atomic force microscopy
- battery
- benchtop
- Benchtop PVD Deposition System
- Benchtop Thermal Evaporation
- Biocompatibility
- bonding
- bone differentiation
- Bosch Etcher
- Bragg Reflector
- cell adhesion
- Chamber
- Characterisation
- Chemical etch
- Chiller
- CMOS
- Coating
- cold atmospheric pressure plasma
- Communicator
- Covid-19
- CRYO Instruments
- crystallography
- Cubesat
- Data Analysis
- Deep Silicon Etch
- Dental
- Deposition
- Direct Write Lithography
- direct writing
- directwrite
- dope
- Dry Etcher
- dry etching
- EA15
- EA15-HP5
- EA15-HP50
- Electrical characterisation
- electron microscopes
- energy harvesting devices
- Etch Process
- Etch Slanted Features
- etching
- Europlasma
- Evaporation
- FlexAL
- GaAs
- Gas
- Glovebox
- Graphene
- Grease
- HDPE
- Health Centre
- heat exchangers
- Heidelberg Instruments
- HEMISPHERICAL ENERY ANALYSERS
- heterostructures
- High Vacuum
- Holograms
- hydrophilicity
- ICP
- ICPMS
- innovation
- installation
- Ion Beam
- Ion beam etching
- ISO9001
- iVacSens
- Lab On Chip
- lithography
- lithography system
- magnetic
- magnetron
- Manipulator
- Maskless Aligner
- Maskless Lithography
- masklessaligner
- Material sciences
- Materialsciences
- memories
- MEMS
- MEMs Vacuum Sealer
- microfabrication
- Microfuidics
- MiniLab 125
- MLA150
- Moorfield
- MoS2 Monolayer
- Nano technology
- Nano Vacuum
- nano-oscillators
- nanofabrication
- nanofluidics
- nanofrazor
- Nanomaterila
- nanoPVD
- nanotechnology
- Nanovac AB
- nanovacuum
- navigation
- Nazia Tabassum
- Nnao Vacuum
- NnaoFrazor
- nomoremasks
- NT-MDT
- Oil
- Oncology
- OpAL
- Optical
- optics
- optoelectronics
- organicmolecules
- Oxford
- Oxford Instrument
- Oxford Instrument Nano Science
- Oxford Instruments
- Oxford Instruments Nano Science
- Oxford Instruments Plasma Technology
- p-n junction
- pattern
- pattern generator
- patterning
- Perovskite Solar Cells
- Perovskites
- photonics
- photovoltaic
- Physical etch
- Piezobrush
- Plasma
- Plasma Cleaner
- Plasma etch
- Plasma Pro 100 Estrelas
- plasma process
- Plasma technology
- plasma treatment
- Plasmaguard
- PlasmaPro
- plastics
- polarity
- Power Device
- Precision Hot Plates
- Pressure
- Prevac
- Process News
- Promotion
- PTIQ software
- PVD
- PVD Systems
- PZ3
- quantum
- Quantum Device
- Quantum Devices
- Quantum technology
- Raman
- Rapid Thermal Annealers
- Recirculating Chillers
- Relocation
- Relyon
- Relyon Plasma
- Replace Mask Aligner
- Rotor Gauge
- RTA
- RTP
- SAM
- scanning probe microscopy
- semiconductor
- SENS4
- SENS4 A/S
- sensor
- sensors
- shear test
- Si deformation
- SiC
- slanted etching
- slanted features
- SmartPirani
- Software
- solar cells
- Solder Reflow Ovens
- Space Mission
- Space research
- Space Simulation
- Specs
- Spectroscopy
- Spintronic
- Sputter
- Sputtering System
- SRG
- start ups
- superconducting qubits
- superconducting single photon detectors
- surface energy
- surface science
- surface treatment
- Synchrotron
- The ProteoxTM
- Thermal Vacuum Chamber
- thermochemical scanning probe lithography
- thin film deposition
- tHz time-domain
- Titanium
- topography
- TPD/TDS system
- TPT Wire Bonder
- Transducer
- Transportbox
- TVAC
- UHV-HP PES Systems
- UniTemp GmbH
- UNSW
- Vacuum
- Vacuum Suitcase
- VSS-300 Vacuum Solder System
- Walk Through Booth
- Wax
- webinar
- wettability
- wire bonding
- X-ray
