SMARTPIRANI™ WIDE RANGE PIRANI TRANSDUCER_VPM-5 Vacuum pressure transducer

Brand: SENS4

Product Code: VMP-5

Availability:Out of stock

Programmable precision vacuum pressure transducer with digital and analog interface

VPM-5 Vacuum pressure transducer

  • Measurement range 1×10-6 to 1,333 mbar (7.5×10-7 to 1,000 Torr)
  • Ultra-wide range and high performance best-in-class MEMS Pirani sensor
  • Precision gas independent diaphragm sensor from 2 to 1,333 mbar.
  • Programmable voltage output and digital RS-232 or RS-485 interface
  • Three solid-state setpoints for process control
  • User programmable via RS-232, RS-485 or S4-Connect™
  • Robust stainless steel flange and enclosure design
  • Pin and output compatible with other vendors gauges 
  • Mountable in any orientation without impact on performance.
  • High over pressure tolerance of 10 bar (145 psi)

The VPM-5 SmartPirani™ vacuum transducer based on patent pending technology offers best-in-class performance and has established new standards by extending the usable vacuum measuring range for thermal conductivity vacuum gauges by 1-3 decades.

 

APPLICATIONS FOR SMARTPIRANI™ VACUUM TRANSDUCERS

  • Mass spectrometers
  • Scanning electron microscopes
  • Furnace heat treatment
  • PVD coating of glass, optics, tools, packaging, decorative
  • Refrigeration manufacturing and service
  • Semiconductor processing equipment
  • Vacuum pump service
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    VPM-5 SMARTPIRANI™ TRANSDUCER SPECIFICATIONS

    Specifications

    Measuring range 1×10-6 to 1,333 mbar (7.5×10-7 to 1,000 Torr)
    Measuring principle 1x10-6 to 1.5 mbar MEMS Pirani thermal conductivity (Heat-loss)
    Measuring principle 2 to 1,333 mbar MEMS piezo resistive diaphragm
    Measuring principle 1.5 to 2 mbar Blended MEMS Pirani / piezo reading
    Accuracy 1×10-5 to 9.99×10-5 25% of reading
    Accuracy 1×10-4 to 7.99 mbar 5 % of reading
    Accuracy 8.00 to 99.9 mbar 1% of reading
    Accuracy 100 to 800 mbar 0.5% of reading
    Accuracy 800 to 1099 mbar 0.25 % of reading
    Accuracy 1,100 to 1,333 mbar 0.5% of reading
    Maximum measuring resolution 1.0E-7 mbar
    Output signal 1 1 VDC/decade (0.5VDC at 1.0E-6 mbar)

    Output signal 2 (MKS 901P, 910, 925 Emulation)

    1 VDC/decade (1.0VDC at 1.0E-5 Torr)
    Output signal 3 (MKS GP 275 Convectron®) 0.375 to 5.659 VDC
    Output signal 4 (MKS 523) 0.5 VDC/decade (MKS 523)
    Output signal 5 (Inficon PSG500, PSG502, PSG510, PSG512) 1.9 - 10 VDC (Inficon PSG55x, Leybold TTR91)
    Output signal 6 (Leybold TTR91, TTR96, TTR101) 1.5 - 8.5 VDC (Pfeiffer TPR260/27x/28x)
    Output signal 7 (MKS GP 275 Convectron®) 1.9 - 9.1 VDC
    Output signal 8 (MKS GP 390 MicroIon) 0.5 VDC/decade
    Output Signal 9 (MKS 971, 972, 974B) 0.5 VDC/decade (MKS 971B, 972B, 974B)
    Output signal 10 (Inficon Gemini output 1) 1 VDC/decade
    Output signal 11 (Inficon Gemini output 2) 1.33 VDC/decade
    Output signal 12 (Inficon Gemini output 3) 0.6 VDC/decade
    Output signal resolution 16 bit
    Solid state relay contact rating (optional) 250 mA, 50 VDC / VAC peak

    Environment conditions



    Operating ambient temperature -40 to +50 °C (-40 to +122 °F)
    Media temperature -20 to +50 °C (-58 to 122 °F)
    Storage ambient temperature -40 to +125 °C (-40 to +257 °F)
    Maximum media pressure 10 bar
    Mounting position Arbitrary
    Protection rating, EN 60529/A2:2013 IP40
    Humidity, IEC 68-2-38 98%, non-condensing

    Power supply



    Supply voltage  12-30 VDC
    Power consumption  350 mW (Max)
    Reverse polarity protection Yes
    Overvoltage protection Yes
    Internal fuse 100 mA (Thermal recoverable)

    Materials

    Vacuum process flange

    SS 1.4307 / AISI 304L stainless steel

    Enclosure

    SS 1.4307 / AISI 304L stainless steel / Aluminum

     

    Vacuum exposed materials (media wetted)

    304L Stainless steel, Kovar, glass, silicon, nickel, aluminum, SiO2, Si3N4, gold, Viton®, low out-gassing epoxy resin, solder, RO4305

    Process leak tightness  <1·10-9 mbar·l/s

    Approvals

    CE EMC directive 2014/30/EU
    RoHS compliance Directive EU 2015/863