SMARTPIRANI™ WIDE RANGE PIRANI TRANSDUCER_VPM-5 Vacuum pressure transducer
Programmable precision vacuum pressure transducer with digital and analog interface
VPM-5 Vacuum pressure transducer
- Measurement range 1×10-6 to 1,333 mbar (7.5×10-7 to 1,000 Torr)
- Ultra-wide range and high performance best-in-class MEMS Pirani sensor
- Precision gas independent diaphragm sensor from 2 to 1,333 mbar.
- Programmable voltage output and digital RS-232 or RS-485 interface
- Three solid-state setpoints for process control
- User programmable via RS-232, RS-485 or S4-Connect™
- Robust stainless steel flange and enclosure design
- Pin and output compatible with other vendors gauges
- Mountable in any orientation without impact on performance.
- High over pressure tolerance of 10 bar (145 psi)
The VPM-5 SmartPirani™ vacuum transducer based on patent pending technology offers best-in-class performance and has established new standards by extending the usable vacuum measuring range for thermal conductivity vacuum gauges by 1-3 decades.
APPLICATIONS FOR SMARTPIRANI™ VACUUM TRANSDUCERS
- Mass spectrometers
- Scanning electron microscopes
- Furnace heat treatment
- PVD coating of glass, optics, tools, packaging, decorative
- Refrigeration manufacturing and service
- Semiconductor processing equipment
- Vacuum pump service
VPM-5 SMARTPIRANI™ TRANSDUCER SPECIFICATIONS