SMARTPIRANI™ ATM TRANSDUCER FOR LOAD-LOCKS_VPM-7 Vacuum pressure transducer

Brand: SENS4

Product Code: 0

Availability:Out of stock

SMARTPIRANI™ ATM TRANSDUCER FOR LOAD-LOCKS

Vacuum pressure transducer with atmospheric switch, digital and analog interface

VPM-7 Vacuum pressure transducer

  • Measurement range 1×10-6 to 1,333 mbar (7.5×10-7 to 1,000 Torr)
  • Ultra-wide range and high performance best-in-class MEMS Pirani sensor
  • Precision gas independent diaphragm sensor from 2 to 1,333 mbar.
  • Atmospheric switching function and gauge pressure measurement output
  • Digital RS-232 or RS-485 interface and programmable voltage output.
  • Three solid-state setpoints for reliable process control
  • Multicolor LED for visual indication of measured pressure level  
  • User programmable via RS-232, RS-485 or S4-Connect™
  • Robust stainless steel flange and enclosure design
  • Pin and output compatible with other vendors gauges 

VPM-7 SMARTPIRANI™ ATM WIDE RANGE VACUUM TRANSDUCER

1×10-6 to 1,333 mbar / 7.5×10-7 to 1,000 Torr / 1×10-4 to 1.333×105  Pa

ADVANTAGES

 

  • Ultra-wide measuring range of 9 decades 
  • Precision atmospheric switch function
  • Reliable solid-state relays for control
  • Barometric ambient pressure measurement
  • 0-10 VDC programmable voltage output with other vendor emulation
  • Digital RS-232 or RS-485 interface
  • StableZero™ drift compensation
  • Drop-in replacement for MKS 901P
  • Vacuum temperature sensor for diagnostics
  • RGB LED color pressure indicator

The VPM-7 SmartPirani™ ATM transducer is designed for semiconductor load-lock precision pressure control and other vacuum applications where accurate pressure measurement relative to atmospheric ambient pressure is important.

It offers best-in-class performance with wider measurement range, higher accuracy, faster measurement cycle than legacy load-lock transducers and other load-lock sensor solutions.

The SmartPirani ATM based on a patent pending technology that has established new standards by extending the useable measuring range for thermal conductivity Pirani heat-loss vacuum gauges by 1-3 decades.  


All-in-one multi-sensor transducer solution

The VPM-7 is a true multi-sensor transducer with four pressure outputs combining a barometric ambient sensor, a wide-range heat-loss Pirani, an absolute diaphragm sensor and a signal relative to atmospheric pressure to optimize pressure control of a modern load-lock vacuum chamber. The diaphragm sensor reading is gas independent from 2 to 1,333 mbar absolute.

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VPM-7 SMARTPIRANI™ ATM TRANSDUCER SPECIFICATIONS

Specifications


Measuring range
1×10-6 to 1,333 mbar (7.5×10-7 to 1,000 Torr)
Measuring principle 1×10-6 to 1.5 mbar
MEMS Pirani thermal conductivity (Heat-loss)
Measuring principle 2 to 1,333 mbar
MEMS piezo resistive diaphragm (non gas dependant)
Measuring principle 1.5 to 2 mbar
Blended MEMS Pirani / piezo reading
Accuracy 1×10-5 to 9.99×10-5
25% of reading
Accuracy 1×10-4 to 9.99 mbar
5 % of reading
Accuracy 10.0 to 99.9 mbar
1% of reading
Accuracy 100 to 800 mbar
0.5% of reading
Accuracy 800 to 1,099 mbar
0.25 % of reading
Accuracy 1,100 to 1,333 mbar
0.5% of reading
Maximum measuring resolution
1.0E-7 mbar
Barometric measurement range
300 to 1,200 mbar
Barometric accuracy
+/- 0.5 mbar
Atmospheric referenced pressure output range
-1,333 to + 1,333 mbar
Vacuum temperature sensor range
-20 to + 85°C
Vacuum temperature sensor accuracy
+/- 1.5 °C
Transducer temperature sensor range
-20 to + 85°C
Transducer temperature sensor accuracy
+/- 1.5 °C
Temperature compensation
+10 to +50 °C
Output signal 1
1 VDC / decade (0.5VDC at 1.0E-6 mbar)
Output signal 2 (MKS 901P, 910, 925 Emulation)
1 VDC / decade (1.0VDC at 1.0E-5 Torr)
Output signal 3 (MKS GP 275 Convectron®)
0.375 to 5.659 VDC
Output signal 4 (MKS 523)
0.5 VDC / decade (MKS 523)
Output signal 5 (Inficon PSG500, PSG502, PSG510, PSG512 )
1.9 - 10 VDC (Inficon PSG55x, Leybold TTR91)
Output signal 6 (Leybold TTR91, TTR96, TTR101)
1.5 - 8.5 VDC (Pfeiffer TPR260/27x/28x)
Output signal 7 (MKS GP 275 Convectron®)
1.9 - 9.1 VDC
Output signal 8 (MKS GP 390 MicroIon)
0.5 VDC / decade
Output Signal 9 (MKS 971, 972, 974B)
0.5 VDC / decade (MKS 971B, 972B, 974B)
Output signal 10 (Inficon Gemini output 1)
1 VDC / decade
Output signal 11 (Inficon Gemini output 2)
1.33  VDC / decade
Output signal 12 (Inficon Gemini output 3)
0.6 VDC / decade
Output signal resolution
16 bit (150 µV)
Solid state relay contact rating (optional)
50 V, 100 mArms / mADC
Solid state relay contact endurance
Unlimited (no mechanical wear)

Environment conditions


Operating ambient temperature
-40 to +50 °C (-40 to +122 °F)
Media temperature
-20 to +50 °C (-58 to 122 °F)
Storage ambient temperature
-40 to +125 °C  (-40 to +257 °F)
Maximum media pressure
10 bar
Mounting position
Arbitrary
Protection rating, EN 60529/A2:2013
IP40
Humidity, IEC 68-2-38
98%, non-condensing

Power supply


Supply voltage 
12-30 VDC
Power consumption 
350 mW (Max)
Yes
Overvoltage protection
Yes
Internal fuse
100 mA (Thermal recoverable)

Materials


Vacuum process flange
SS 1.4307 / AISI 304L stainless steel
Enclosure
SS 1.4307 / AISI 304L stainless steel / Aluminum 6061
Vacuum exposed materials (media wetted)
304L Stainless steel, Kovar, glass, silicon, nickel, aluminum, SiO2, Si3N4, gold, Viton®, low out-gassing epoxy resin, solder, RO4305
Process leak tightness 
<1·10-9 mbar·l/s

Approvals


CE
EMC directive 2014/30/EU
RoHS compliance
Directive EU 2015/863
Solid state setpoint control relay approvals
UL Recognized: File E76270CSA Certified: Certificate 1175739EN/IEC 60950-1 Certified