DN63CF FUSED SILICA VIEWPORT EXCIMER GRADE, 0.18 to 2μ, NO COATING

DN63CF FUSED SILICA VIEWPORT EXCIMER GRADE, 0.18 to 2μ, NO COATING

Allectra SKU: 110-VPQZ-C63-EX
  • In stock, ready to ship
  • Backordered, shipping soon
  • Estimated Leadtime = days
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Inclusions max 0.03mm2 /100cm3 (class 0)

Specifications

  • Vacuum Leak Rate UHV <5x10-10 mbar l/s
  • Size or DN DN63CF (4 ½ " OD flange)
  • Compliance ISO 3669:2017
  • Vacuum Seal Annealed Cu Gasket
  • Body Material Stainless Steel 304
  • Temperature Range -100°C to 200°C
  • Transmission >99.5%@ 193nm
  • Inside Diameter 68mm
  • Dimension A 6.4
  • Flatness λ/4 @632nm
  • Parallelism <10 arc sec
  • Surface Finish 20-10 Scratch-dig
  • Optical Material Excimer EUV grade Fused Silica, grade A 3D
  • Optical Range 180-2000nm

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