Inclusions max 0.03mm2 /100cm3 (class 0)
Specifications
- Vacuum Leak Rate UHV <5x10-10 mbar l/s
- Size or DN DN63CF (4 ½ " OD flange)
- Compliance ISO 3669:2017
- Vacuum Seal Annealed Cu Gasket
- Body Material Stainless Steel 304
- Temperature Range -100°C to 200°C
- Transmission >99.5%@ 193nm
- Inside Diameter 68mm
- Dimension A 6.4
- Flatness λ/4 @632nm
- Parallelism <10 arc sec
- Surface Finish 20-10 Scratch-dig
- Optical Material Excimer EUV grade Fused Silica, grade A 3D
- Optical Range 180-2000nm
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