GEMStar XTTM family produces best in class ALD films from high aspect ratio particles through 200mm substrates both in single substrate and batch modes of operation.
The GEMStar XT-DPTM Plasma Enhanced Atomic Layer Deposition (PEALD) system extends the capabilities of the GEMStar XTTM Thermal system to include best in class plasma processing through the full range of substrates.
Configured with a 300 Watt air cooled direct Inductively Coupled Plasma (ICP) RF system with four mass flow controlled gas inputs, either single (S) or dual (D) 200 °C manifold zones, four (S) or eight (D) high speed material ALD valve ports (one with vapor push technology), two locatable 200°C material temperature zones and an external gas interface, the GEMStar XT-DPTM system is a powerful plasma enabled tool to extend your research and processing requirements to the next level.
Some key features of the system include:
- 300-Watt Air Cooled Direct ICP
- Head with four metal sealed mass flow-controlled plasma gas inputs
- Adjustable reactor temperature up to 300°C Up to 200°C uniform gas distribution delivery
- Pulsed Vapor Push (PVPTM) to handle very low pressure material
- Substrate configurable end effectors up to 200 mm diameter substrates, as well as a 450°C heated platen option
- User selectable carrier gas MFC controlled input up to 200 SCCM
- Field proven GEMFlowTM Control System.
Ease of Operation
The Arradiance GEMFlowTM Software provides complete user control over all key operating parameters such as temperature, gas flow rate, highspeed ALD valves, RF Power and vacuum isolation.
- Preloaded on business level Windows® Laptop User created processes can be saved enabling substrate to substrate and batch to batch consistency without sacrificing flexibility
- Diagnostic system and logging creates traceable data of all system parameters during operation
- Internal GEMStar XT USB control module
Serviceability
Modular ergonomic design with top panel access to all critical components
- Fast precursor changes and reconfiguration
- Easy access power, vacuum and gas connections
- Perfectly suited for glove box configuration
Specifications
|
System Dimensions |
Main - 25” H x 32” W x 24” D designed to fit on desktop, lab bench or glovebox Half Rack - 11”H x 12”W x 21”D for RF Power Supply |
|
Door Mounted Substrate End Effector |
Specify end effector diameter at time of order (200 mm default, 150 mm, 100 mm) Other sizes or batch cassettes available on request |
|
Reactor/Door Thermal Zones |
Two controllable zones up to 300 °C ± 1 °C Optional 450 °C Processing available on request |
|
RF Plasma Source |
300 W ICP Air Cooled Power adjustable head with automatic tuning Four mass flow controlled (MFC) plasma gas inputs with automatic pneumatic safety normally closed valves |
|
Material Manifold |
Single (S) or Dual (D) controllable manifold zone up to 200 °C Four (S) or Eight (D) High Speed ALD Valve Controlled Material Ports Single Pulsed Vapor Push (PVPTM) Zone controlled by High Speed ALD Valve |
|
Material Bottle Heated Zones |
Up to four movable zones up to 200 °C |
|
Material Bottles |
Up to four or six (2 STD) DOT certified 150 ML Bottles with bellows sealed valves |
|
External Gas Input |
Main System - Up to 4 (2 STD) Inputs for external user selectable gasses RF System – 4 inputs, 3 are user selectable for Plasma gas inputs |
|
Inert Carrier Gas |
Mass Flow Controlled up to 200 SCCM |
| Control System | GEMFlowTM Control Software Windows® Professional 64-bit Laptop GEMStar XTTM USB control module |
| RF Power Supply | 11”H x 12”W x 21”D Half Rack |
| Metrology Port | Spare NF-40 In Line metrology port for QCM or other customer needs |
| Vacuum Gauge | Convection Vacuum Gauge Optional ALD Insensitive Capacitive Monometer Gauge |
The system is perfectly suited for glove box configuration.
GEMStar XT Options
GEMStar XT Systems offer many standard options to enhance system process and metrology capabilities. Most are easily field upgradeable. We also support custom requirements.
GEMStar XT Glovebox Integrated Systems
Custom designed for Arradiance by VTI, we offer single and dual station Gloveboxes supporting multiple GEMStar systems simultaneously offering both back and side mounted GEMStar systems
ARR-850880 Glovebox Interface
Working with leading manufactures like VTI, GEMStar XT easily interfaces to all suppliers
ARR-859000 Load Lock
Manual load lock system to degas samples before being introduced to the ALD reactor
ARR-40591B-DOT Material Bottles
130ML DOT4B Certified GEMStar Material Bottle compatible with all GEMStar Systems
Bottles can be filled by STREM Chemicals for most materials
ARR-850593 Material Heater Jackets
XT Systems have two material heater zones and can be upgraded to four zones with additional heater jackets
Batch Processing
Arradiance offers many options for batch processing
ARR-850600-6 450°C Heated Platen
Single wafer processing platen door for 150mm substrates
ARR-850600-SR/DR Particle Coating
Arradiance offers several options for particle coating
ARR-850402-KF25-GP
NW-25 ALD TPGP Vacuum Gauge Protector utilizing our patent pending TPGP technology
ARR-851850-C Quartz Crystal Monitor
Quartz Crystal Monitor Sensor, controller
Mounts directly to our standard KF-40 Metrology Port
Ozone Generator
Should your process require a water free film process, we offer a high-performance Ozone generator and hardware to allow injection though one of GEMStar XT’s external gas inputs.
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