Inclusions max 0.03mm2 /100cm3 (class 0)

Specifications

• Vacuum Leak Rate UHV <5x10-10 mbar l/s
• Size or DN DN40CF (2 ¾” OD flange)
• Compliance ISO 3669:2017
• Vacuum Seal Annealed Cu Gasket
• Body Material Stainless Steel 304
• Temperature Range -100°C to 200°C max. 50°C per min
• Transmission >99.5%@ 193nm
• Inside Diameter 35mm
• Dimension A 3.3
• Flatness λ/4 @632nm
• Parallelism <10 arc sec
• Surface Finish 20-10 Scratch-dig
• Optical Material Excimer EUV grade Fused Silica, grade A 3D
• Optical Range 180-2000nm