UHV All-Metal Variable Leak Valve

UHV All-Metal Variable Leak Valve

Leybold SKU: UHV All-Metal Variable Leak Valve
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UHV All-Metal Variable Leak Valve

Our UHV all metal  variable leak valves are the reliable solution for all applications in ultra-high vacuum. The innovative design and rotatable CF flanges allow a convenient handling and an easy installation.

The reliability of the valve is achieved by the use of optimal sealing materials. The silver-coated sealing with its very long service life is maintenance-free at more than 20.000 cycles.

Advantages to the User

  • Very reliable sealing
  • Maintenance-free for over 20.000 cycles
  • Coated spindle, no lubrication necessary
  • Very high lifetime due to the coated metal sealing

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    Technical Data

    UHV-All-Metal Variable Leak Valve
    Connection flange DN 16 CF-R
    Position indication   Linear scale - scale ring
    Leak rate
    to the outside
    seat "closed position"
    mbar x l/s
    mbar x l/s
    ≤ 1 x 10-10
    ≤ 1 x 10-10
    Molecular conductance l/s 0.05
    Adjustable gas flow [air, 1 bar, RT] mbar x l/s 1 x 10-10 - 500
    Dead volume
    seat port
    side port
    cm3
    cm3
    2.7
    1.1
    Pressure range bar (abs.) UHV to 10
    Test pressure bar 1
    Differential pressure bar ≤ 10
    Max. differential pressure at opening bar ≤ 10
    Cycles until first service   20.000
    Bake-out temperature
    open
    closed
    actuator
    °C
    °C
    °C
    ≤ 300
    ≤ 300
    ≤ 300
    Heating and cooling rate °C/h ≤ 60
    Material
    body
    diaphragm


    1.4943, AISI 660 / 1.4404, AISI 316 L
    1.4310, AISI 301, gold plated
    Mounting position   any
    Radiation resistance Gy (rad)

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