Specifications
- Vacuum Leak Rate UHV <5x10-10 mbar l/s
 - Size or DN DN63CF (4 ½ " OD flange)
 - Compliance Circular Miniature (CM)
 - Conductor Material NiFe
 - Temperature Range -200°C to 220°C (Air socket max. 85oC)
 - Number of Pins 38
 
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