• XY travel of ±12.5 mm guided with cross roller bearings. • Bakeable to 200°C. • Travelling flange 70mm OD (DN40CF) with M6 tapped holes, straddled about the Y axis • Base flange is 70mm OD (DN40CF) • Double bolt holes on mounting flange. • Operating pressure 1 bar to 10-11 mbar • Leak rate 1x10-10 mbar ls-1 • XY Resolution 0.001 mm repeatability 0.005 mm • Z Resolution 0.005 mm repeatability 0.010 mm
Specifications
- Size or DN DN40CF (2 ¾” OD flange)
- Temperature Range Bakeable to 200°C
- Dimension A 160mm to 260mm
- Dimension C 301mm
- Travel 100mm Z
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