Inductively Coupled Plasma Etching (ICPRIE) Tool from Oxford Instruments is all set to arrive in Australia for the ANFF-QLD Node

by Natasha Sufi

Nano Vacuum is thrilled to have confirmed order for the Oxford Instruments Inductively Coupled Plasma Etching (ICP RIE), for Australian National Fabrication Facility -Queensland.



ANFF- QLD stated “ANFFQ is an open access facility for academic and industrial researchers across Australia and internationally. ANFFQ provides micro and nano fabrication services to enable users to build devices that help to realise and extend client outputs. The ICPRIE will enhance current etching capability and broaden the scope of applications at ANFFQ. THE ICPRIE system will be capable of etching silicon and silicon compound materials from nano to micro scales.”

James Carter, Director of Nano Vacuum Australia & NZ commented “We are thrilled that Nano Vacuum continues to support ANFF nodes in acquiring cutting edge nanofabrication tools, enabling clients to realize their research, development and commercialization in micro and nanofabrication applications.”

Nano Vacuum has over 25 years’ experience within the nanofabrication industry, servicing customers through a network of global trusted manufacturers and suppliers. Nano Vacuum provides the best service and advice to our Australian, New Zealand and global customer base, enabling you with the most cutting-edge nanofabrication tools available for tomorrow’s research. The range of deposition, etching, plasma modification, clean/inert environments, packaging and lithography tools offer nanofabrication resources to ensure you stay at the forefront of the highly competitive research space.

Oxford Instruments Plasma Technology has been trading since 1982 and has developed a process solution library of over 7,000 recipes. They have over 40 years of experience in plasma physics across the group to give customers access to a fantastic knowledge base. their world-class cleanroom at their headquarters in Bristol, UK is dedicated to developing the latest technology, helping current and future customers develop cutting edge solutions. Their systems & analytical equipment enable a full range of process technologies developed by their expert applications team.

Learn more about the ICP-RIE Here

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