Another Oxford Instruments system is coming to Australia for Griffith University

by Natasha Sufi

Nano Vacuum is thrilled to have confirmed order for the Oxford Instruments Inductively Coupled Plasma Chemical Vapour Deposition System (ICP-CVD), for Australian National Fabrication Facility -Queensland at Griffith University.


The ICP-CVD process module is designed to produce high quality films from room temperature to 400°C with high density plasmas at low deposition pressures and temperatures.

Glen Walker, Facility Manager at Australian National Fabrication Facility (QLD-Griffith Hub) stated "ANFF-Q is an open-door R&D facility assisting clients from industry and academia to progress their products. The ICPCVD expands upon ANFF-Q’s fabrication techniques, broadening the scope of applications that can be supported. The system will be capable of depositing a large range of high-quality films including silicon oxide, silicon nitride, silicon oxynitride and silicon carbide."

James Carter, Director of Nano Vacuum Australia & NZ commented “We are thrilled that Nano Vacuum continues to support ANFF nodes in acquiring cutting edge nanofabrication tools, enabling clients to realise their research, development and commercialisation in micro and nanofabrication applications.”

Nano Vacuum has over 25 years’ experience within the nanofabrication industry, servicing customers through a network of global trusted manufacturers and suppliers. Nano Vacuum provides the best service and advice to our Australian, New Zealand and global customer base, enabling you with the most cutting-edge nanofabrication tools available for tomorrow’s research. The range of deposition, etching, plasma modification, clean/inert environments, packaging and lithography tools offer nanofabrication resources to ensure you stay at the forefront of the highly competitive research space.

Oxford Instruments Plasma Technology has been trading since 1982 and has developed a process solution library of over 7,000 recipes. They have over 40 years of experience in plasma physics across the group to give customers access to a fantastic knowledge base. their world-class cleanroom at their headquarters in Bristol, UK is dedicated to developing the latest technology, helping current and future customers develop cutting edge solutions. Their systems & analytical equipment enable a full range of process technologies developed by their expert applications team.

Learn More about the ICPCVD Here  

Share this

Explore more

Popular posts