Features:
- Designed by HANBELL and 100% made in Taiwan
- 25% power saving than previous version and Green mode equipped
- Thermal control solution to avoid cold spat inside of pump
- Optimize pump size, easy for plug and play
Application
- Etch
- Implant
- HDP-CVD
- SACVD
- MOCVD
- PECVD
- LPCVD
-
ALD
Technical Data
|
Specification / Model |
iPH100 |
iPH200 |
iPH610 |
iPH1210 |
iPH1220 |
iPH1820 |
|
|
Max.Pumping Speed (m³/h) |
120 |
200 |
700 |
1100 |
1250 |
1850 |
|
|
Ultimate Pressure (Torr) |
7.5 x 10-3 |
7.5 x 10-4 |
|||||
|
Power Consumption (kW) |
2.1 |
3.5 |
2.6 |
3 |
4.5 |
4.7 |
|
|
Dimensions (mm) |
L |
816 |
816 |
816 |
816 |
816 |
860 |
|
W |
390 |
390 |
390 |
390 |
390 |
400 |
|
|
H |
526 |
526 |
780 |
780 |
780 |
780 |
|
Pumping Curve:
Download Brochure Here
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