UNIXX-SERIES

• Spin & spray coater, developer, temperature and smartEBR modules are available as stand-alone, table-top or bench mounted configurations.
• Base frame design allows various process modules configurations.
• Round wafer up to Ø300 mm (Ø12 inch)
• Square substrate size up to 230 x 230 mm (9 x 9 inch)

The product range also offers customized single processing systems for large substrates up to 1.300 x 1.300 mm (51 x 51 inch). Optional sub-systems; PR dispense systems (pumps, syringe or CPD).

HOTPLATES

SPRAY COATER

Designed to be used in applications:

SPRAY COATING for all topographies and shapes.

3D & 2D SPRAY COATER SYSTEM for flat, concave or convex surfaces

• For large scale optical devices and substrates up to 21‟x 21‟
• 6 axis robot system & up to 2 ultra-sonic spray nozzles
• Integrated heating chuck under the spray coating area

SPRAY COATER MODULE for surfaces with topographic structure

• Wafer size up to Ø 300 mm (Ø12‟)
• Module can be installed in automatic systems

Optional sub-systems; PR dispense systems (pumps and syringe).