Name: UNIXX SHp22 (Ø200mm) Stand-alone system with open bowl spin coater & hotplate module.
Brand: OSIRIS
SKU: UNIXX SHp22
Availability: InStock

UNIXX SHp22
(Ø200mm) Stand-alone system with
open bowl spin coater & hotplate module.

Your inquiry was submitted successfully. You can expect to hear from us shortly.

UNIXX-SERIES

Spin & spray coater, developer, temperature and smartEBR modules are available as stand-alone, table-top or bench mounted configurations.
Base frame design allows various process modules configurations.
Round wafer up to Ø300 mm (Ø12 inch)
Square substrate size up to 230 x 230 mm (9 x 9 inch)

The product range also offers customized single processing systems for large substrates up to 1.300 x 1.300 mm (51 x 51 inch). Optional sub-systems; PR dispense systems (pumps, syringe or CPD).

SPIN COATER - open bowl Designed to be used in applications: SPIN COATING with open-bowl for standard coating.(CCP)