SMARTPIRANI™ ATM TRANSDUCER FOR LOAD-LOCKS
Vacuum pressure transducer with atmospheric switch, digital and analog interface
VPM-7 Vacuum pressure transducer
- Measurement range 1×10-6 to 1,333 mbar (7.5×10-7 to 1,000 Torr)
- Ultra-wide range and high performance best-in-class MEMS Pirani sensor
- Precision gas independent diaphragm sensor from 2 to 1,333 mbar.
- Atmospheric switching function and gauge pressure measurement output
- Digital RS-232 or RS-485 interface and programmable voltage output.
- Three solid-state setpoints for reliable process control
- Multicolor LED for visual indication of measured pressure level
- User programmable via RS-232, RS-485 or S4-Connect™
- Robust stainless steel flange and enclosure design
- Pin and output compatible with other vendors gauges
VPM-7 SMARTPIRANI™ ATM WIDE RANGE VACUUM TRANSDUCER
1×10-6 to 1,333 mbar / 7.5×10-7 to 1,000 Torr / 1×10-4 to 1.333×105 Pa
ADVANTAGES
- Ultra-wide measuring range of 9 decades
- Precision atmospheric switch function
- Reliable solid-state relays for control
- Barometric ambient pressure measurement
- 0-10 VDC programmable voltage output with other vendor emulation
- Digital RS-232 or RS-485 interface
- StableZero™ drift compensation
- Drop-in replacement for MKS 901P
- Vacuum temperature sensor for diagnostics
- RGB LED color pressure indicator
The VPM-7 SmartPirani™ ATM transducer is designed for semiconductor load-lock precision pressure control and other vacuum applications where accurate pressure measurement relative to atmospheric ambient pressure is important.
It offers best-in-class performance with wider measurement range, higher accuracy, faster measurement cycle than legacy load-lock transducers and other load-lock sensor solutions.
The SmartPirani ATM based on a patent pending technology that has established new standards by extending the useable measuring range for thermal conductivity Pirani heat-loss vacuum gauges by 1-3 decades.
All-in-one multi-sensor transducer solution
The VPM-7 is a true multi-sensor transducer with four pressure outputs combining a barometric ambient sensor, a wide-range heat-loss Pirani, an absolute diaphragm sensor and a signal relative to atmospheric pressure to optimize pressure control of a modern load-lock vacuum chamber. The diaphragm sensor reading is gas independent from 2 to 1,333 mbar absolute.
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VPM-7 SMARTPIRANI™ ATM TRANSDUCER SPECIFICATIONS
Specifications |
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Measuring range
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1×10-6 to 1,333 mbar (7.5×10-7 to 1,000 Torr)
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Measuring principle 1×10-6 to 1.5 mbar
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MEMS Pirani thermal conductivity (Heat-loss)
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Measuring principle 2 to 1,333 mbar
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MEMS piezo resistive diaphragm (non gas dependant)
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Measuring principle 1.5 to 2 mbar
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Blended MEMS Pirani / piezo reading
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Accuracy 1×10-5 to 9.99×10-5
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25% of reading
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Accuracy 1×10-4 to 9.99 mbar
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5 % of reading
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Accuracy 10.0 to 99.9 mbar
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1% of reading
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Accuracy 100 to 800 mbar
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0.5% of reading
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Accuracy 800 to 1,099 mbar
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0.25 % of reading
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Accuracy 1,100 to 1,333 mbar
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0.5% of reading
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Maximum measuring resolution
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1.0E-7 mbar
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Barometric measurement range
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300 to 1,200 mbar
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Barometric accuracy
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+/- 0.5 mbar
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Atmospheric referenced pressure output range
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-1,333 to + 1,333 mbar
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Vacuum temperature sensor range
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-20 to + 85°C
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Vacuum temperature sensor accuracy
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+/- 1.5 °C
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Transducer temperature sensor range
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-20 to + 85°C
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Transducer temperature sensor accuracy
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+/- 1.5 °C
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Temperature compensation
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+10 to +50 °C
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Output signal 1
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1 VDC / decade (0.5VDC at 1.0E-6 mbar)
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Output signal 2 (MKS 901P, 910, 925 Emulation)
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1 VDC / decade (1.0VDC at 1.0E-5 Torr)
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Output signal 3 (MKS GP 275 Convectron®)
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0.375 to 5.659 VDC
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Output signal 4 (MKS 523)
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0.5 VDC / decade (MKS 523)
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Output signal 5 (Inficon PSG500, PSG502, PSG510, PSG512 )
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1.9 - 10 VDC (Inficon PSG55x, Leybold TTR91)
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Output signal 6 (Leybold TTR91, TTR96, TTR101)
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1.5 - 8.5 VDC (Pfeiffer TPR260/27x/28x)
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Output signal 7 (MKS GP 275 Convectron®)
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1.9 - 9.1 VDC
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Output signal 8 (MKS GP 390 MicroIon)
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0.5 VDC / decade
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Output Signal 9 (MKS 971, 972, 974B)
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0.5 VDC / decade (MKS 971B, 972B, 974B)
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Output signal 10 (Inficon Gemini output 1)
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1 VDC / decade
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Output signal 11 (Inficon Gemini output 2)
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1.33 VDC / decade
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Output signal 12 (Inficon Gemini output 3)
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0.6 VDC / decade
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Output signal resolution
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16 bit (150 µV)
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Solid state relay contact rating (optional)
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50 V, 100 mArms / mADC
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Solid state relay contact endurance
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Unlimited (no mechanical wear)
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Environment conditions |
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Operating ambient temperature
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-40 to +50 °C (-40 to +122 °F)
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Media temperature
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-20 to +50 °C (-58 to 122 °F)
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Storage ambient temperature
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-40 to +125 °C (-40 to +257 °F)
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Maximum media pressure
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10 bar
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Mounting position
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Arbitrary
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Protection rating, EN 60529/A2:2013
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IP40
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Humidity, IEC 68-2-38
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98%, non-condensing
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Power supply |
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Supply voltage
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12-30 VDC
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Power consumption
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350 mW (Max)
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Yes
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Overvoltage protection
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Yes
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Internal fuse
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100 mA (Thermal recoverable)
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Materials |
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Vacuum process flange
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SS 1.4307 / AISI 304L stainless steel
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Enclosure
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SS 1.4307 / AISI 304L stainless steel / Aluminum 6061
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Vacuum exposed materials (media wetted)
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304L Stainless steel, Kovar, glass, silicon, nickel, aluminum, SiO2, Si3N4, gold, Viton®, low out-gassing epoxy resin, solder, RO4305
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Process leak tightness
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<1·10-9 mbar·l/s
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Approvals |
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CE
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EMC directive 2014/30/EU
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RoHS compliance
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Directive EU 2015/863
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Solid state setpoint control relay approvals
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UL Recognized: File E76270CSA Certified: Certificate 1175739EN/IEC 60950-1 Certified
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