The Extorr XT residual gas analyzer is a quadrupole mass spectrometer complete with a built-in Pirani gauge and Ion gauge. It is an essential measuring device which may be used in any vacuum system. The Extorr XT residual gas analyzer (RGA) models come in 100, 200 and 300 amu packages. All RGA models attach to a single 2 3/4 inch flange. Each package has automatic start-up and shut down and will constantly monitor from atmospheric pressure to ultra high vacuum. The built-in Pirani gauge and ion gauge constantly monitor total pressure and regulate and protect the RGA. These functions are seamlessly integrated into the Extorr software package.
Mass range |
|
| XT100 | 1 to 100 amu Faraday cup (FC) |
| XT200 | 1 to 200 amu Faraday cup (FC) |
| XT300 | 1 to 300 amu Faraday cup (FC) |
| XT100M | 1 to 100 amu Faraday cup (FC) and Electron Multiplier (EM) |
| XT200M | 1 to 200 amu Faraday cup (FC) and Electron Multiplier (EM) |
| XT300M | 1 to 300 amu Faraday cup (FC) and Electron Multiplier (EM) |
Mass filter type |
Quadrupole |
Detector type |
Faraday cup (FC), Standard Electron Multiplier (EM), Optional |
Resolution |
Better than 0.5 amu @ 10% peak height. Adjustable to constant peak width throughout the mass range. |
Sensitivity (A/Torr) |
5 x 10-4 into Faraday cup. Measured with N2 @ 28 amu with 1 amu full peak width, 10% height, 70 eV electron energy, 6 eV ion energy and2 mA electron emission. |
Minimum detectable
|
Measured with N2 @ 28 amu with 1 amu full peak width, 10% height, 70eV electron energy, 6 eV ion energy, and 2 mA electron emission. |
| Faraday cup | 5 x 10-12 |
| Electron multiplier | 5 x 10-14 |
Operating range |
UHV to Atmosphere |
| Pirani gauge | 10-3 Torr to ATM |
| Ion Gauge | operation below 10-2 Torr |
| Partial Pressures | operation below 10-4 Torr |
Operating temperature |
50 °C Electronics, 100 °C Probe |
Bakeout temperature |
300 °C (Probe only, CCU removed) |
Total pressure
|
|
| Pirani gauge | 10-3 Torr to ATM |
| Ion Gauge | 2 x 10-10 Torr to 10-2 Torr |
Probe Materials |
SS304, Kovar, Tungsten, Alumina, Iridium, Copper, Nickel, Thoria, Platinum |
Ionizer Design |
Open ion source, electron impact ionization |
Filament |
Dual thoria coated iridium with firmware protection. Built-in 1 to 30W degas ramp-up. Field replaceable. |
Electron energy |
11 to 150V, programmable |
Ion energy |
1 to 12V, programmable |
Focus Voltage |
0 to 150V, programmable |
Electron emission
|
0.1 to 4 mA, programmable |
Probe Dimensions |
6.8” from flange face to top of ionizer |
Probe mounting
|
2.75” CF |
Minimum tube I.D. |
1.375” |
CCU Dimensions |
3.3” x 4.8” x 7.4”, Easily separated from probe for bakeout. |
CCU Extension |
6.2” from flange face with mounting hardware. |
Warm-up time |
Mass stability ± 0.1 amu after 30 minutes. |
Computer Interface |
RS-232C, up to 115,200 baud, or USB. |
Minimum PC
|
PC running Windows 2000, XP, 7, 8, or 10 with 1024 x 768 VGA graphics, keyboard, mouse, CD ROM Drive, and 1 Unused USB or RS- 232C Port. |
Software |
Included VacuumPlus Windows based application. |
Power requirement |
24 VDC @ 2.5 Amps. 120/240 VAC adaptor included. |
Weight |
9 lbs. Total, Probe and CCU. |
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