Nanofabrication Systems

9 products

    NanoVac offers a wide range of deposition, etching, annealing, lithography and processing tools for the nanotechnology & nanofabrication research and production markets. NanoVac represents major manufacturers including Oxford Instruments, Moorfield Nanotechnology, Edwards Vacuum, Heidelberg and Korea Kiyon. 

    Our tools include:

    • Physical Vapour Deposition (PVD)
    • Chemical Vapour Deposition (CVD)
    • Plasma Enhanced Chemical Vapour Deposition (PECVD)
    • Inductively Coupled Plasma Chemical Vapour Deposition (ICPCVD)
    • Annealing
    • Reactive Ion Etching (RIE)
    • Inductively Coupled Plasma Reactive Ion Etching (ICPRIE)
    • Deep Silicon Etching
    • Atomic Layer Deposition (ALD)
    • Atomic Layer Etching (ALE)
    • Ion Beam Etching (IBE)
    • Ion Beam Deposition (IBD)
    • Graphene and Carbon Nanotube CVD
    • Direct Laser Writing Lithography
    • Gloveboxes & Solvent Purification
    9 products
    nanoDEP Physical Vapour Deposition (PVD)
    Boson
    PlasmaPro 100 Nano CVD - Nano Vacuum Australia & New Zealand
    PlasmaPro 100 Nano CVD
    Oxford Instruments Plasma
    PlasmaPro 100 Estrelas - Nano Vacuum
    PlasmaPro 100 Estrelas
    Oxford Instruments Plasma
    PlasmaPro 800 RIE - Nano Vacuum
    PlasmaPro 800 RIE
    Oxford Instruments Plasma
    PlasmaPro 100 RIE - Nano Vacuum
    PlasmaPro 100 RIE
    Oxford Instruments Plasma
    PlasmaPro 80 RIE - Nano Vacuum
    PlasmaPro 80 RIE
    Oxford Instruments Plasma
    PlasmaPro 100 Polaris ICP-RIE - Nano Vacuum
    PlasmaPro 100 Polaris ICP-RIE
    Oxford Instruments Plasma
    PlasmaPro 100 Cobra ICP-RIE - Nano Vacuum
    PlasmaPro 100 Cobra ICP-RIE
    Oxford Instruments Plasma
    PlasmaPro 80 ICP-RIE - Nano Vacuum
    PlasmaPro 80 ICP-RIE
    Oxford Instruments Plasma

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