Nanofabrication Systems

Nanofabrication Systems

22 products

    NanoVac offers a wide range of deposition, etching, annealing, lithography and processing tools for the nanotechnology & nanofabrication research and production markets. NanoVac represents major manufacturers including Oxford Instruments, Moorfield Nanotechnology, Edwards Vacuum, Heidelberg and Korea Kiyon. 

    Our tools include:

    • Physical Vapour Deposition (PVD)
    • Chemical Vapour Deposition (CVD)
    • Plasma Enhanced Chemical Vapour Deposition (PECVD)
    • Inductively Coupled Plasma Chemical Vapour Deposition (ICPCVD)
    • Annealing
    • Reactive Ion Etching (RIE)
    • Inductively Coupled Plasma Reactive Ion Etching (ICPRIE)
    • Deep Silicon Etching
    • Atomic Layer Deposition (ALD)
    • Atomic Layer Etching (ALE)
    • Ion Beam Etching (IBE)
    • Ion Beam Deposition (IBD)
    • Graphene and Carbon Nanotube CVD
    • Direct Laser Writing Lithography
    • Gloveboxes & Solvent Purification
    22 products
    Perovskite Solar Cell Thin Film Deposition Tool - Nano Vacuum Australia & New Zealand
    MiniLab 026 Modular PVD System
    Moorfield Nanotech
    PlasmaPro 100 Nano CVD - Nano Vacuum Australia & New Zealand
    PlasmaPro 100 Nano CVD
    Oxford Instruments Plasma
    PlasmaPro 100 Estrelas - Nano Vacuum
    PlasmaPro 100 Estrelas
    Oxford Instruments Plasma
    PlasmaPro 800 RIE - Nano Vacuum
    PlasmaPro 800 RIE
    Oxford Instruments Plasma
    PlasmaPro 100 RIE - Nano Vacuum
    PlasmaPro 100 RIE
    Oxford Instruments Plasma
    PlasmaPro 80 RIE - Nano Vacuum
    PlasmaPro 80 RIE
    Oxford Instruments Plasma
    PlasmaPro 100 Polaris ICP-RIE - Nano Vacuum
    PlasmaPro 100 Polaris ICP-RIE
    Oxford Instruments Plasma
    PlasmaPro 100 Cobra ICP-RIE - Nano Vacuum
    PlasmaPro 100 Cobra ICP-RIE
    Oxford Instruments Plasma
    PlasmaPro 80 ICP-RIE - Nano Vacuum
    PlasmaPro 80 ICP-RIE
    Oxford Instruments Plasma
    nanoPVD T15A - Benchtop Thermal Evaporator - Nano Vacuum Australia & New Zealand
    nanoPVD T15A - Benchtop Thermal Evaporator
    Moorfield Nanotech
    nanoPVD S10A-WA - Benchtop Sputtering 8" Substrates - Nano Vacuum Australia & New Zealand
    nanoPVD S10A-WA - Benchtop Sputtering 8" Substrates
    Moorfield Nanotech
    anoPVD S10A - Benchtop Sputtering PVD System - Nano Vacuum Australia & New Zealand
    nanoPVD S10A - Benchtop Sputtering PVD System
    Moorfield Nanotech
    nanoETCH - Soft Etch For Graphene & 2D Materials - Nano Vacuum
    nanoETCH - Soft Etch For Graphene & 2D Materials
    Moorfield Nanotech
    nanoEM - SEM/TEM Sample Prep Coater - Nano Vacuum
    nanoEM - SEM/TEM Sample Prep Coater
    Moorfield Nanotech
    nanoCVD-WPG For Graphene (Plasma Enhanced) - Nano Vacuum
    nanoCVD-WPG For Graphene (Plasma Enhanced)
    Moorfield Nanotech
    nanoCVD-8N For Carbon Nanotubes - Nano Vacuum
    nanoCVD-8N For Carbon Nanotubes
    Moorfield Nanotech
    nanoCVD-8G For Graphene - Nano Vacuum
    nanoCVD-8G For Graphene
    Moorfield Nanotech
    Nano Vacuum Australia & New Zealand MiniLab 125 Physical Vapour Deposition System
    MiniLab 125 Modular PVD System
    Moorfield Nanotech
    Perovskite Solar Cell Modular Thin Film Deposition System - Nano Vacuum Australia & New Zealand
    MiniLab 090 Modular PVD System
    Moorfield Nanotech
    Nano Vacuum Australia & New Zealand MiniLab 080 Physical Vapour Deposition System
    MiniLab 080 Modular PVD System
    Moorfield Nanotech
    Nano Vacuum Australia & New Zealand MiniLab 060 Multi-Technique Physical Vapour Deposition System
    MiniLab 060 Modular PVD System
    Moorfield Nanotech
    Annealing Systems - Benchtop - Nano Vacuum
    Annealing Systems - Benchtop
    Moorfield Nanotech

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