Nanofabrication Systems

NanoVac offers a wide range of deposition, etching, annealing, lithography and processing tools for the nanotechnology & nanofabrication research and production markets. NanoVac represents major manufacturers including Oxford Instruments, Moorfield Nanotechnology, Edwards Vacuum, Heidelberg and Korea Kiyon. 

Our tools include:

  • Physical Vapour Deposition (PVD)
  • Chemical Vapour Deposition (CVD)
  • Plasma Enhanced Chemical Vapour Deposition (PECVD)
  • Inductively Coupled Plasma Chemical Vapour Deposition (ICPCVD)
  • Annealing
  • Reactive Ion Etching (RIE)
  • Inductively Coupled Plasma Reactive Ion Etching (ICPRIE)
  • Deep Silicon Etching
  • Atomic Layer Deposition (ALD)
  • Atomic Layer Etching (ALE)
  • Ion Beam Etching (IBE)
  • Ion Beam Deposition (IBD)
  • Graphene and Carbon Nanotube CVD
  • Direct Laser Writing Lithography
  • Gloveboxes & Solvent Purification

Nanofabrication Systems

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MiniLab 026 systems are compact floor standing vacuum evaporators with easy-access 'clam-shell' chambers. Suitable for metal, dielectric and...
Benchtop, turnkey system for high performance RF and DC magnetron sputtering for metals and insulating materials. Compact as...
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Our ion beam deposition products are chosen for their ability to produce deposited films with high quality, dense...
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Ion beam etch offers maximum flexibility coupled with excellent uniformity and is suitable for a wide range of...
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The PlasmaPro 100 Estrelas platform is designed to give total flexibility for Deep Silicon Etch (DSiE) applications -...
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The PlasmaPro 800 offers a flexible solution for reactive ion etching (RIE) processes on large wafer batches and...
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The PlasmaPro 100 RIE modules deliver anisotropic dry etching for an extensive range of processes. Compatible with all...
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The PlasmaPro 80 reactive ion etch (RIE) is a compact, small footprint system offering versatile etch and deposition...
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An evolution in single wafer etch technology. With extensive experience of etching materials such as GaN, SiC and...
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The PlasmaPro 100 range of etch and deposition tools can be fitted with a variety of substrate electrodes,...
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The PlasmaPro 80 ICP is a compact, small footprint system offering versatile ICP etch solutions with convenient open...
High-performance organics and metals evaporation in compact packages for benchtop location. Superior, efficient performance and ideal for OLED,...
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