Nanofabrication Systems
10 products
NanoVac offers a wide range of deposition, etching, annealing, lithography and processing tools for the nanotechnology & nanofabrication research and production markets. NanoVac represents major manufacturers including Oxford Instruments, Moorfield Nanotechnology, Edwards Vacuum, Heidelberg and Korea Kiyon.
Our tools include:
- Physical Vapour Deposition (PVD)
- Chemical Vapour Deposition (CVD)
- Plasma Enhanced Chemical Vapour Deposition (PECVD)
- Inductively Coupled Plasma Chemical Vapour Deposition (ICPCVD)
- Annealing
- Reactive Ion Etching (RIE)
- Inductively Coupled Plasma Reactive Ion Etching (ICPRIE)
- Deep Silicon Etching
- Atomic Layer Deposition (ALD)
- Atomic Layer Etching (ALE)
- Ion Beam Etching (IBE)
- Ion Beam Deposition (IBD)
- Graphene and Carbon Nanotube CVD
- Direct Laser Writing Lithography
- Gloveboxes & Solvent Purification
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