The HVA pneumatic ISO-F flange series of standard cycle gate valves are designed for high vacuum applications. These valves provide valving for cryopumps, turbo pumps, ion pumps and other applications requiring clean, low outgassing valves
Specifications
- Vacuum Leak Rate HV <1x10-8 mbar l/s
- Size or DN DN63ISO-K flange
- Vacuum Seal Viton O Ring, Viton Bonnet
- Body Material Stainless Steel
- Temperature Range Open 200°C, Closed 150°C
- Inside Diameter 63.5
- Thickness 51.4
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