IPH Series For Harsh Processes

IPH Series For Harsh Processes

Hanbell SKU: IPH Series For Harsh Processes
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Features:

  •  Designed by HANBELL and 100% made in Taiwan
  • 25% power saving than previous version and Green mode equipped
  • Thermal control solution to avoid cold spat inside of pump
  • Optimize pump size, easy for plug and play

 

Application 

  • Etch
  • Implant
  • HDP-CVD
  • SACVD
  • MOCVD
  • PECVD
  •  LPCVD
  • ALD 

    Technical Data

Specification / Model

iPH100

iPH200

iPH610

iPH1210

iPH1220

iPH1820

Max.Pumping Speed (m³/h)

120

200

700

1100

1250

1850

Ultimate Pressure (Torr)

7.5 x 10-3

7.5 x 10-4

Power Consumption (kW)

2.1

3.5

2.6

3

4.5

4.7

Dimensions (mm)

L

816

816

816

816

816

860

W

390

390

390

390

390

400

H

526

526

780

780

780

780



Pumping Curve
:


 

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