UNIXX S760+ (21x21 inch) Stand-alone system spin coater for large substrates.

Name: UNIXX S760+ (21x21 inch) Stand-alone system spin coater for large substrates.
Brand: OSIRIS
SKU: UNIXX S760+
Availability: InStock

OSIRIS

SKU: UNIXX S760+

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UNIXX-SERIES

Spin & spray coater, developer, temperature and smartEBR modules are available as stand-alone, table-top or bench mounted configurations.
Base frame design allows various process modules configurations.
Round wafer up to Ø300 mm (Ø12 inch)
Square substrate size up to 230 x 230 mm (9 x 9 inch)

The product range also offers customized single processing systems for large substrates up to 1.300 x 1.300 mm (51 x 51 inch). Optional sub-systems; PR dispense systems (pumps, syringe or CPD).

SPIN COATER - CCP Designed to be used in applications: SPIN COATING with Covered Chuck Processor (CCP)