SMARTPIRANI™ WIDE RANGE PIRANI TRANSDUCER-Nano Vacuum Australia and New Zealand
SMARTPIRANI™ WIDE RANGE PIRANI TRANSDUCER-Nano Vacuum Australia and New Zealand
SMARTPIRANI™ WIDE RANGE PIRANI TRANSDUCER-Nano Vacuum Australia and New Zealand
SMARTPIRANI™ WIDE RANGE PIRANI TRANSDUCER-Nano Vacuum Australia and New Zealand

SMARTPIRANI™ WIDE RANGE PIRANI TRANSDUCER_VPM-5 Vacuum pressure transducer

SENS4 SKU: VMP-5
Your inquiry was submitted successfully. You can expect to hear from us shortly.

Programmable precision vacuum pressure transducer with digital and analog interface

VPM-5 Vacuum pressure transducer

  • Measurement range 1×10-6 to 1,333 mbar (7.5×10-7 to 1,000 Torr)
  • Ultra-wide range and high performance best-in-class MEMS Pirani sensor
  • Precision gas independent diaphragm sensor from 2 to 1,333 mbar.
  • Programmable voltage output and digital RS-232 or RS-485 interface
  • Three solid-state setpoints for process control
  • User programmable via RS-232, RS-485 or S4-Connect™
  • Robust stainless steel flange and enclosure design
  • Pin and output compatible with other vendors gauges 
  • Mountable in any orientation without impact on performance.
  • High over pressure tolerance of 10 bar (145 psi)

The VPM-5 SmartPirani™ vacuum transducer based on patent pending technology offers best-in-class performance and has established new standards by extending the usable vacuum measuring range for thermal conductivity vacuum gauges by 1-3 decades.

 

APPLICATIONS FOR SMARTPIRANI™ VACUUM TRANSDUCERS

  • Mass spectrometers
  • Scanning electron microscopes
  • Furnace heat treatment
  • PVD coating of glass, optics, tools, packaging, decorative
  • Refrigeration manufacturing and service
  • Semiconductor processing equipment
  • Vacuum pump service
Download brochure here

    VPM-5 SMARTPIRANI™ TRANSDUCER SPECIFICATIONS

    Specifications
    Measuring range 1×10-6 to 1,333 mbar (7.5×10-7 to 1,000 Torr)
    Measuring principle 1x10-6 to 1.5 mbar MEMS Pirani thermal conductivity (Heat-loss)
    Measuring principle 2 to 1,333 mbar MEMS piezo resistive diaphragm
    Measuring principle 1.5 to 2 mbar Blended MEMS Pirani / piezo reading
    Accuracy 1×10-5 to 9.99×10-5 25% of reading
    Accuracy 1×10-4 to 7.99 mbar 5 % of reading
    Accuracy 8.00 to 99.9 mbar 1% of reading
    Accuracy 100 to 800 mbar 0.5% of reading
    Accuracy 800 to 1099 mbar 0.25 % of reading
    Accuracy 1,100 to 1,333 mbar 0.5% of reading
    Maximum measuring resolution 1.0E-7 mbar
    Output signal 1 1 VDC/decade (0.5VDC at 1.0E-6 mbar)

    Output signal 2 (MKS 901P, 910, 925 Emulation)

    		 1 VDC/decade (1.0VDC at 1.0E-5 Torr)
    Output signal 3 (MKS GP 275 Convectron®) 0.375 to 5.659 VDC
    Output signal 4 (MKS 523) 0.5 VDC/decade (MKS 523)
    Output signal 5 (Inficon PSG500, PSG502, PSG510, PSG512) 1.9 - 10 VDC (Inficon PSG55x, Leybold TTR91)
    Output signal 6 (Leybold TTR91, TTR96, TTR101) 1.5 - 8.5 VDC (Pfeiffer TPR260/27x/28x)
    Output signal 7 (MKS GP 275 Convectron®) 1.9 - 9.1 VDC
    Output signal 8 (MKS GP 390 MicroIon) 0.5 VDC/decade
    Output Signal 9 (MKS 971, 972, 974B) 0.5 VDC/decade (MKS 971B, 972B, 974B)
    Output signal 10 (Inficon Gemini output 1) 1 VDC/decade
    Output signal 11 (Inficon Gemini output 2) 1.33 VDC/decade
    Output signal 12 (Inficon Gemini output 3) 0.6 VDC/decade
    Output signal resolution 16 bit
    Solid state relay contact rating (optional) 250 mA, 50 VDC / VAC peak

    Environment conditions



    Operating ambient temperature -40 to +50 °C (-40 to +122 °F)
    Media temperature -20 to +50 °C (-58 to 122 °F)
    Storage ambient temperature -40 to +125 °C (-40 to +257 °F)
    Maximum media pressure 10 bar
    Mounting position Arbitrary
    Protection rating, EN 60529/A2:2013 IP40
    Humidity, IEC 68-2-38 98%, non-condensing

    Power supply



    Supply voltage  12-30 VDC
    Power consumption  350 mW (Max)
    Reverse polarity protection Yes
    Overvoltage protection Yes
    Internal fuse 100 mA (Thermal recoverable)

    Materials

    Vacuum process flange

    SS 1.4307 / AISI 304L stainless steel
    Enclosure

    SS 1.4307 / AISI 304L stainless steel / Aluminum

     
    Vacuum exposed materials (media wetted)

    304L Stainless steel, Kovar, glass, silicon, nickel, aluminum, SiO2, Si3N4, gold, Viton®, low out-gassing epoxy resin, solder, RO4305
    Process leak tightness  <1·10-9 mbar·l/s

    Approvals
    CE EMC directive 2014/30/EU
    RoHS compliance Directive EU 2015/863

    This site is protected by hCaptcha and the hCaptcha Privacy Policy and Terms of Service apply.
    You may also like
    More from SENS4
    More from Best Selling Products
    KF NW Aluminium Cast Swing Clamps with Al/NBR Centering Ring Package - Nano Vacuum
    KF NW Aluminium Cast Swing Clamps with Al/NBR Centering Ring Package
    Nano Vacuum
    KF NW Blank Stainless Steel Flanges - Nano Vacuum
    KF NW Blank Stainless Steel Flanges
    Nano Vacuum
    KF25 NW Thick Wall Stainless Steel Bellows Flexible Hose - Nano Vacuum
    KF25 NW Thick Wall Stainless Steel Bellows Flexible Hose
    Nano Vacuum
    KF NW Centering Rings Stainless Steel/FKM Viton O Rings - Nano Vacuum
    KF NW Centering Rings Stainless Steel/FKM Viton O Rings
    Nano Vacuum
    KF NW Straight Reducers Stainless Steel
    Nano Vacuum
    Recently viewed
    Back to Best Selling Products