DN63CF DUV GRADE FUSED SILICA VIEWPORT FOR 248nm KrF EXCIMER LASER
Allectra
SKU: 110-KRF-C63
Laser damage threshold 10J/cm2 for 10ns pulse
Specifications
- Vacuum Leak Rate UHV <5x10-10 mbar l/s
- Size or DN DN63CF (4 ½ " OD flange)
- Compliance ISO 3669:2017
- Vacuum Seal Annealed Cu Gasket
- Body Material Stainless Steel 304
- Temperature Range -100°C to 200°C
- Transmission 248nm
- Inside Diameter 68mm
- Flatness λ/4 @632nm
- Coating V-coat with <0.25% reflection/surface
- Parallelism <10 arc sec
- Surface Finish 20/10 Scratch/Dig
- Optical Material DUV grade fused Silica