DN40CF EXCIMER GRADE FUSED SILICA VIEWPORT FOR 193nm ArF EXCIMER LASER

DN40CF EXCIMER GRADE FUSED SILICA VIEWPORT FOR 193nm ArF EXCIMER LASER

Allectra SKU: 110-ARF-C40
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Laser damage threshold 1J/cm2 for 10ns pulse

Specifications

  • Vacuum Leak Rate UHV <5x10-10 mbar l/s
  • Size or DN DN40CF (2 ¾” OD flange)
  • Compliance ISO 3669:2017
  • Vacuum Seal Annealed Cu Gasket
  • Body Material Stainless Steel 304
  • Temperature Range -100°C to 200°C max.
  • Transmission 193nm
  • Inside Diameter 35mm
  • Flatness λ/4 @632nm
  • Coating V-coat with <0.25% reflection/surface
  • Parallelism <10 arc sec
  • Surface Finish 20/10 Scratch/Dig
  • Optical Material Excimer grade fused silica

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