• XY travel of ±12.5 mm guided with cross roller bearings. • Bakeable to 200°C. • Standard base flange is 152mm OD (NW100CF) with straddled clearance holes for mounting the translator. • Four mini ports, tapped M4, are provided for service feedthroughs (152mm OD base flange only) • Travelling flange 70mm OD (NW35CF) with M6 tapped holes, straddled about the Y axis • Double bolt holes on mounting flange. • Operating pressure 1 bar to 10-11 mbar • Leak rate 1x10-10 mbar ls-1 • XY Resolution 0.001 mm repeatability 0.005 mm • Z Resolution 0.005 mm repeatability 0.010 mm
Specifications
- Size or DN DN100CF Base flange with 4 x DN16CF ports
- Temperature Range Bakeable to 200°C
- Dimension A 160mm to 210mm
- Dimension C 260mm
- Travel 50mm Z
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