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Nano Vacuum Pty Ltd
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Fabrication
Atomic Layer Deposition
Benchtop
Floorstanding
Atomic Layer Etching
Floorstanding
Chemical Vapour Deposition
CVD
PECVD
ICPCVD
Benchtop - 2D Materials
Dry Plasma Etching
ICP Etch
RIE
Deep Si Etch
Benchtop - 2D Materials
Ion Beam
Deposition
Etch
Plasma Cleaning/Ashing
Atmospheric
Physical Vapour Deposition
Benchtop
Glovebox Integrated
Multi-Technique
Vacuum Heating/Ovens
Rapid Thermal Annealing
Reflow Solder Systems
MEMS Packaging Sealer
Deposition Material
Sputtering Targets
Evaporation Pellets
Crucibles
Parylene Coating Systems
Benchtop ALD - GEMStar XT-P Thermal and PEALD
Arradiance
Lithography & Inkjet Printing
Direct Write
Maskless Aligner
Laser
Semiconductor Mask Writer
Thermal Scanning Probe
3D Lithography
Lithography Processing Equipment
Spin Coater
Spray Coater
EBR
Developer
Automatic production System
Inkjet Printing
Photoresists and Photopolymers
Negative Photoresists
Positive Photoresists
Hybrid Polymers
Nanoimprint Resists
Inkjet Materials
Ancillaries
μMLA The Table-Top Maskless Aligner
Heidelberg Instruments
Characterisation
Surface Characterization
ONYX-THz waves for electrical properties
Irys-THz waves for nano-layer thickness
Thermal Vacuum (TVAC) Chambers
OPV & OLED
Modeling Software
Large Area Simulation Software
Electrical Characterization
Angular Luminescence Spectrometer
Stability Testing
Parallel JV and Stability
Quantum Transport Measurement
Surface Science
EnviroESCA
EnviroMETROS LAB
EnviroMETROS FAB
Near Ambient Pressure-XPS Systems
ARPES
PEEM/LEEM
Momentum Microscopy
SPM Control System
3D Imaging
Galaxy Thermal Vacuum Chamber (TVAC) Solutions
NanoVac AB
Packaging
Glovebox & Solvent Purification
Standard
Cleanroom
Custom
Solvent Purification
Clean Air Solutions
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Dicing Saw
Laser Saw
Polisher
Grinder
Components
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Clamps
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Hoses
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CF Fittings
Blanks
Tees
Nipples
Reducers
Elbows
Crosses
Hex Head Bolts
OFHC Copper Gaskets/ Seals
Plate Nuts
Blank Flanges Rotatable
Double Face Flanges
Bored Flanges Rotatable
ISO Fittings
Blank Flanges
Bored
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Clamps
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Elbows
Nipples
Replacement O-Rings
Spacer Rings
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SDS HITACHI OIL-FREE SCREW COMPRESSOR
Hanbell
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Dry Compressing Pumps
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Viewports
Service
AS3000 compliance
Pump maintenance
Leak detection and Rental
Service Request form
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Goes great with
Edwards RV12 Package Including EMF20, Valve & Tube Adaptors
Edwards Vacuum
$4,800
00
$4,800.00
Edwards RV8 Package Including EMF10, Valve & Tube Adaptors
Edwards Vacuum
$4,370
00
$4,370.00
Edwards RV5 Package Including EMF10, Valve & Tube Adaptors
Edwards Vacuum
$3,860
00
$3,860.00
Edwards RV3 Package Including EMF10, Valve & Tube Adaptors
Edwards Vacuum
$3,550
00
$3,550.00
Add order note
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Fabrication
Expand submenu
Fabrication
View all
Atomic Layer Deposition
Expand submenu
Atomic Layer Deposition
View all
Benchtop
Floorstanding
Atomic Layer Etching
Expand submenu
Atomic Layer Etching
View all
Floorstanding
Chemical Vapour Deposition
Expand submenu
Chemical Vapour Deposition
View all
CVD
PECVD
ICPCVD
Benchtop - 2D Materials
Dry Plasma Etching
Expand submenu
Dry Plasma Etching
View all
ICP Etch
RIE
Deep Si Etch
Benchtop - 2D Materials
Ion Beam
Expand submenu
Ion Beam
View all
Deposition
Etch
Plasma Cleaning/Ashing
Expand submenu
Plasma Cleaning/Ashing
View all
Atmospheric
Physical Vapour Deposition
Expand submenu
Physical Vapour Deposition
View all
Benchtop
Glovebox Integrated
Multi-Technique
Vacuum Heating/Ovens
Expand submenu
Vacuum Heating/Ovens
View all
Rapid Thermal Annealing
Reflow Solder Systems
MEMS Packaging Sealer
Deposition Material
Expand submenu
Deposition Material
View all
Sputtering Targets
Evaporation Pellets
Crucibles
Parylene Coating Systems
Lithography & Inkjet Printing
Expand submenu
Lithography & Inkjet Printing
View all
Direct Write
Expand submenu
Direct Write
View all
Maskless Aligner
Laser
Semiconductor Mask Writer
Thermal Scanning Probe
3D Lithography
Lithography Processing Equipment
Expand submenu
Lithography Processing Equipment
View all
Spin Coater
Spray Coater
EBR
Developer
Automatic production System
Inkjet Printing
Photoresists and Photopolymers
Expand submenu
Photoresists and Photopolymers
Negative Photoresists
Positive Photoresists
Hybrid Polymers
Nanoimprint Resists
Inkjet Materials
Ancillaries
Characterisation
Expand submenu
Characterisation
View all
Surface Characterization
Expand submenu
Surface Characterization
View all
ONYX-THz waves for electrical properties
Irys-THz waves for nano-layer thickness
Thermal Vacuum (TVAC) Chambers
OPV & OLED
Expand submenu
OPV & OLED
Modeling Software
Large Area Simulation Software
Electrical Characterization
Angular Luminescence Spectrometer
Stability Testing
Parallel JV and Stability
Quantum Transport Measurement
Surface Science
Expand submenu
Surface Science
View all
EnviroESCA
EnviroMETROS LAB
EnviroMETROS FAB
Near Ambient Pressure-XPS Systems
ARPES
PEEM/LEEM
Momentum Microscopy
SPM Control System
3D Imaging
Packaging
Expand submenu
Packaging
Glovebox & Solvent Purification
Expand submenu
Glovebox & Solvent Purification
View all
Standard
Cleanroom
Custom
Solvent Purification
Clean Air Solutions
Expand submenu
Clean Air Solutions
View all
Portable Cleanrooms
Modular Cleanrooms
Flexible Wall Clean Canopies
Powder Containment
Fume Cupboards & Downflow
Laminar Flow Cabinets
Biological Safety Cabinets
Wire & Die Bonders
Wafer Dicing
Expand submenu
Wafer Dicing
View all
Dicing Saw
Laser Saw
Polisher
Grinder
Components
Expand submenu
Components
View all
KF Fittings
Expand submenu
KF Fittings
View all
Adaptors
Blanks
Centering Rings
Clamps
Crosses
Elbows
Hoses
Reducers
Tees
Weld Flanges
Nipples
CF Fittings
Expand submenu
CF Fittings
View all
Blanks
Tees
Nipples
Reducers
Elbows
Crosses
Hex Head Bolts
OFHC Copper Gaskets/ Seals
Plate Nuts
Blank Flanges Rotatable
Double Face Flanges
Bored Flanges Rotatable
ISO Fittings
Expand submenu
ISO Fittings
View all
Blank Flanges
Bored
Centering Rings
Clamps
Claws
Elbows
Nipples
Replacement O-Rings
Spacer Rings
Tees
Way Crosses
Vacuum Sealants & Lubricants
Valves
Expand submenu
Valves
View all
Manual
Gate Valves
Vacuum Pumps
Expand submenu
Vacuum Pumps
View all
Rotary Vane
Scroll
Turbo
Cryo
Dry Compressing Pumps
Valves
Fluids & Oils
Instruments
Expand submenu
Instruments
View all
Gauges
Leak Detector
Residual Gas Analyzer
Recirculating Chillers
Gas & Fluid Fittings
Expand submenu
Gas & Fluid Fittings
View all
6 Series Tube Fitting
Feedthroughs & Viewports
Expand submenu
Feedthroughs & Viewports
View all
Space Simulation
Feedthroughs
Viewports
Service
Expand submenu
Service
AS3000 compliance
Pump maintenance
Leak detection and Rental
Service Request form
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Edwards RV12 Package Including EMF20, Valve & Tube Adaptors
Edwards Vacuum
$4,800
00
$4,800.00
Edwards RV8 Package Including EMF10, Valve & Tube Adaptors
Edwards Vacuum
$4,370
00
$4,370.00
Edwards RV5 Package Including EMF10, Valve & Tube Adaptors
Edwards Vacuum
$3,860
00
$3,860.00
Edwards RV3 Package Including EMF10, Valve & Tube Adaptors
Edwards Vacuum
$3,550
00
$3,550.00
Edwards RV Series Clean & Overhaul Kit - A65201131
Edwards Vacuum
$306
00
$306.00
Edwards TW Oil - 20L - H11012026 - Chemical/Corrosive Applications
Edwards Vacuum
$2,373
00
$2,373.00
Edwards TW Oil - 4L - H11012013 - Chemical/Corrosive Applications
Edwards Vacuum
$579
00
$579.00
Edwards TW Oil - 1L - H11012015 - Chemical/Corrosive Applications
Edwards Vacuum
$209
00
$209.00
Edwards Ultragrade 70 - 205L - H11028010
Edwards Vacuum
$3,750
00
$3,750.00
Edwards Ultragrade 20 - 205L - H11024010
Edwards Vacuum
$3,750
00
$3,750.00
Sold Out
Edwards Ultragrade 20 - 4L - H11024013
Edwards Vacuum
$159
70
$159.70
Edwards Ultragrade 20 - 1L - H11024015
Edwards Vacuum
$21
00
$21.00
Edwards Ultragrade 15 - 205L - H11026010
Edwards Vacuum
$3,750
00
$3,750.00
Edwards Ultragrade 15 - 4L - H11026013
Edwards Vacuum
$79
50
$79.50
Edwards Ultragrade 15 - 1L - H11026015
Edwards Vacuum
$21
00
$21.00
Edwards Ultragrade 19 - 205L - H11025010
Edwards Vacuum
$3,750
00
$3,750.00
Edwards Ultragrade 19 - 4L - H11025013
Edwards Vacuum
$159
70
$159.70
Edwards Ultragrade 19 - 1L - H11025015
Edwards Vacuum
$55
00
$55.00
Edwards E2M80 Rotary Vane Vacuum Pump (3ph Motor 380-400V 50Hz, 230/460 60Hz)
Edwards Vacuum
$11,419
00
$11,419.00
Edwards E2M40 Rotary Vane Vacuum Pump (3ph Motor 380-400V 50Hz, 230/460 60Hz)
Edwards Vacuum
$10,106
00
$10,106.00
Edwards E2M28 Rotary Vane Vacuum Pump (1ph Motor 115/230V, 50/60Hz)
Edwards Vacuum
Edwards E2M18 Rotary Vane Vacuum Pump (1ph Motor 115/230V, 50/60Hz)
Edwards Vacuum
$7,508
00
$7,508.00
Edwards E2M1.5 Rotary Vane Vacuum Pump (1ph Motor 200-230V, 50/60Hz)
Edwards Vacuum
$4,071
82
$4,071.82
Edwards E2M0.7 Rotary Vane Vacuum Pump (1ph Motor 200-230V, 50/60Hz)
Edwards Vacuum
$3,872
34
$3,872.34
Edwards nXDS20iC Scroll Dry Vacuum Pump (1ph Motor 100-240V, 50/60Hz)
Edwards Vacuum
Edwards nXDS15iC Scroll Dry Vacuum Pump (1ph Motor 100-240V, 50/60Hz)
Edwards Vacuum
Edwards nXDS10iC Scroll Dry Vacuum Pump (1ph Motor 100-240V, 50/60Hz)
Edwards Vacuum
Edwards nXDS6iC Scroll Dry Vacuum Pump (1ph Motor 100-240V, 50/60Hz)
Edwards Vacuum
$8,027
35
$8,027.35
Vacuum Pump Inlet Particulate Filter, Nickel Finish, KF25 - HEPA Filter
Solberg
$724
00
$724.00
Edwards XDS46i Scroll Dry Vacuum Pump (1ph Motor 100-230V, 50/60Hz)
Edwards Vacuum
$23,325
48
$23,325.48
Edwards nXDS6i & nXDS10i Dry Scroll Bearing Replacement Kit A73501802
Edwards Vacuum
Edwards nXDS Dry Scroll Pumps Tip Seal Kit
Edwards Vacuum
$578
89
$578.89
Edwards XDS35i Scroll Dry Vacuum Pump (1ph Motor 100-230V, 50/60Hz)
Edwards Vacuum
$16,094
65
$16,094.65
Edwards nXDS15i Scroll Dry Vacuum Pump (1ph Motor 100-240V, 50/60Hz)
Edwards Vacuum
MICROPROF® TL 3D Metrology Measuring Tool
FRT Germany
MICROPROF® FE 3D Metrology Measuring Tool
FRT Germany
MICROPROF® FS 3D Metrology Measuring Tool
FRT Germany
MICROPROF® MHU 3D Metrology Measuring Tool
FRT Germany
MICROPROF® 300 3D Metrology Measuring Tool
FRT Germany
MICROPROF® 200 3D Metrology Measuring Tool
FRT Germany
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