Oxford Instruments Cluster Tool for R&D - Nano Vacuum Australia & New Zealand

Fabrication

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  • ADT

Fabrication tools are used to deposit, heat, etch, modify, reshape or clean materials. Nano Vacuum offer tools and accessories for R&D, pilot and production systems. An overview of the equipment and tools we supply for fabrication include:
- Physical Vapour Deposition
- Atomic Layer Deposition
- Dry Etching
- Chemical Vapour Deposition
- Ion Beam Deposition
- Vacuum Heating / High Temperature Ovens
- Plasma Cleaning & Ashing
- Gloveboxes
- Dicing Saws
- Clean Tents

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