ALD Systems - Benchtop
3 products
The Arradiance GEMStar XT product family delivers high quality performance in a compact Benchtop platform. Now with more configurable options to meet specific Customer requirements and budgets, we are confident that GEMStar can take your ALD research or low volume manufacturing to the next level.
XT systems can be configured as single (4 ALD port) or dual (8 ALD port) 200 °C manifolds with four easily locatable ALD bottle material heated zones, and up to four external gas lines. All systems have one port equipped with our Pulsed Vapor Push technology for low vapor pressure materials.
Our GEMFlow™ scripting software allows easy creation of jobs for the most complicated nanaolaminate films providing real time history of process and equipment parameters.
XT systems can be configured as single (4 ALD port) or dual (8 ALD port) 200 °C manifolds with four easily locatable ALD bottle material heated zones, and up to four external gas lines. All systems have one port equipped with our Pulsed Vapor Push technology for low vapor pressure materials.
Our GEMFlow™ scripting software allows easy creation of jobs for the most complicated nanaolaminate films providing real time history of process and equipment parameters.
3 products
Recently viewed
