ALD Systems - Benchtop

3 products

The Arradiance GEMStar XT product family delivers high quality performance in a compact Benchtop platform. Now with more configurable options to meet specific Customer requirements and budgets, we are confident that GEMStar can take your ALD research or low volume manufacturing to the next level.

XT systems can be configured as single (4 ALD port) or dual (8 ALD port) 200 °C manifolds with four easily locatable ALD bottle material heated zones, and up to four external gas lines. All systems have one port equipped with our Pulsed Vapor Push technology for low vapor pressure materials.

Our GEMFlow™ scripting software allows easy creation of jobs for the most complicated nanaolaminate films providing real time history of process and equipment parameters.
GEMStar XT Thermal ALD-Nano Vacuum Australia and New Zealand
Benchtop ALD - GEMStar XT Thermal ALD
Arradiance
Benchtop ALD- GEMStar XT-R Thermal ALD upgradeable to PEALD-Nano Vacuum Australia and New Zealand
Benchtop ALD - GEMStar XT-R Thermal ALD upgradeable to PEALD
Arradiance
GEMStar XT-P Thermal and PEALD-Nano Vacuum Australia and New Zealand
Benchtop ALD - GEMStar XT-P Thermal and PEALD
Arradiance
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