ALD Systems - Benchtop
The Arradiance GEMStar XT product family delivers high quality performance in a compact Benchtop platform. Now with more configurable options to meet specific Customer requirements and budgets, we are confident that GEMStar can take your ALD research or low volume manufacturing to the next level.

XT systems can be configured as single (4 ALD port) or dual (8 ALD port) 200 °C manifolds with four easily locatable ALD bottle material heated zones, and up to four external gas lines. All systems have one port equipped with our Pulsed Vapor Push technology for low vapor pressure materials.

Our GEMFlow™ scripting software allows easy creation of jobs for the most complicated nanaolaminate films providing real time history of process and equipment parameters.

ALD Systems - Benchtop

The most configurable Thermal Atomic Layer Deposition system with a global installed base supporting a wide range of...
If your current requirements are thermal ALD, but you need a future path to PEALD, GEMStar XT-R systems...
The GEMStar XT-DPTM Plasma Enhanced Atomic Layer Deposition (PEALD) system extends the capabilities of the GEMStar XTTM Thermal...
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