ALD System - Floorstanding

Oxford Instruments’ ALD product family offers a unique range of flexibility and capability in the engineering of nanoscale structures and devices by combining remote plasma ALD processes with thermal ALD.

ALD System - Floorstanding

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The FlexAL systems provide a new range of flexibility and capability in the engineering of nanoscale structures and...
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The OpAL system introduces a unique open load thermal atomic layer deposition (ALD) tool with plasma option. It...
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