3D Surface Metrology Tools

FRT manufactures powerful surface metrology tools for various sectors such as development, production and quality control. Due to the design and construction of these multi-sensor devices, FRT tools can be used for many applications.
The key to a perfect product is the fast and accurate measurement of surfaces of any kind in manufacturing. FRT metrology tools determine roughness, profile, topography, film thickness and many other surface parameters while setting new standards.
The MicroProf^® enables for a wide range of measurement tasks which can be carried out quickly, efficiently and intuitively. As an established standard measuring device in modern 3D surface measurement technology, the MicroProf^® has impressed our customers for many years for example in the semiconductor, medical and automotive industries. They are also at home in the MEMS/NANO/MST, sapphire, photovoltaic, engineering, optics and packaging industries.
Whether you want to measure the topography, the total thickness or the film thickness of your samples without contact, the versatile MicroProf^® can be used universally due to the proven optical multi-sensor technology. Various optical measurement methods, which are only available as individual solutions elsewhere, have been combined into a universal, space-saving device. Depending on your requirements, the MicroProf^®allows you to perform quick overview measurements of the entire sample, as well as high-resolution detail measurements down to the sub-nm range. This is made possible by the individual combinations of the sensors. Maintain flexibility for your future measurements and retrofit sensors easily and quickly, saving space, time and costs.