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5 products

    5 products
    UNIXX D30 Standard (Ø300mm) Stand-alone system provide users in science, and research with a productive, safe and clean system.
    OSIRIS
    UNIXX D20 Advanced (Ø200mm) Stand-alone system with movable splash ring for manual load-/unload of single substrates.
    OSIRIS
    VARIXX 1204 (Ø300mm) with 4 process modules
    OSIRIS
    VARIXX 806 (Ø200mm) with 6 process modules
    OSIRIS
    VARIXX 804 (Ø200mm) with 4 process modules
    OSIRIS
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