The nanoPVD-S10A-WA is a Wide-Area configuration that extends the capabilities of the nanoPVD-S10A to allow for even coating of substrate diameters up to 8", in a benchtop package. RF and DC magnetron sputtering allow for deposition of both metals and insulating materials.

While keeping the same chamber design, the Wide-Area version of the nanoPVD-S10A contains magnetron sputtering sources oriented directly upwards towards substrate platens. This arrangement in combination with substrate rotation and exposure plates with specially-designed orifices allows for coating of substrates up to 8" diameter for applications in which tight uniformity specifications are not critical.

Like the nanoPVD-S10A, magnetrons are water-cooled for sustained high-power operation and accept industry-standard targets. In addition, nanoPVD-S10A-WA units come with all attractive features of the nanoPVD range including turbomolecular pumping systems, recipe-based automated operation via touchscreen HMIs, and compact designs for benchtop location. 

Key features:

• Application-specific configuration for the nanoPVD-S10A
• Uniform coating for substrates up to 8” diameter
• Water-cooled magnetron sputtering sources for industry-standard 2" targets
• MFC-controlled process gases
• DC and/or RF power supplies
• Fully automatic operation via touchscreen HMI
• Define/save multiple process recipes
• Base pressures <5 × 10^-7 mbar
• Equipped for easy servicing
• Comprehensive safety features
• Cleanroom compatible
• Proven performance 

Options:

Available options include:

• Dry backing pump
• Fast chamber vent
• Automatic high-resolution pressure control
• Additional process gases
• Up to 2 magnetron sputtering sources
• RF and/or DC power supplies
• SputterSwitch power supply/source switching technology
• Quartz crystal sensor head 

Configurations:

The nanoPVD-S10-WA is a semi-custom tool, with final design being subject to customer requirements.

Call us today to discuss your requirements! 

Service Requirements:

All nanoPVD-S10A-WA systems require chilled water, dry compressed air, nitrogen for venting (optional), process gas supplies and electrical power.

Exact requirements will be provided with quotations or on request.