The nanoEM system is the first electron microscopy (EM) coating tool with a full research-grade feature set.

The units include stainless-steel chambers, turbomolecular pumping systems, water-cooled circular magnetrons for continuous operation and a precision sputtering power supply (DC; up to 300 W) as standard, all in a space-saving benchtop package. Ease-of-use and coating speed are built in for routine preparation of TEM/SEM samples (e.g., with sputtering of gold and/or carbon), but with high-end components and compatibility with conventional targets, the possibilities are endless. 

Key features:

• Electron microscopy and research- grade coating
• Compact, benchtop unit
• SEM stub/TEM grid/wafer supports
• Up to 2 × 2” magnetron sputtering sources
• Industry- standard sputtering targets
• Turbomolecular pumping to <5 × 10^{- 7} mbar
• MFC- controlled process gas
• Variable output DC power supply, up to 300 W
• Fully automatic, recipe operation via touchscreen HMI
• Equipped for easy servicing
• Comprehensive safety features
• Cleanroom compatible
• Proven performance 

Options:

Available options include:

• Chamber viewports
• Backing pump only
• Dry pumping
• Automatic pressure control
• Shutter
• Plasma glow electrode
• Stage rotation and tilt
• Quartz crystal sensor head process monitoring 

System requirements:

All nanoEM systems require chilled water, dry compressed air, nitrogen for venting (optional), process gas (Ar), and electrical power.

Exact requirements will be provided with quotations or on request.