nanoEM - SEM/TEM Sample Prep Coater
The nanoEM system is the first electron microscopy (EM) coating tool with a full research-grade feature set.
The units include stainless-steel chambers, turbomolecular pumping systems, water-cooled circular magnetrons for continuous operation and a precision sputtering power supply (DC; up to 300 W) as standard, all in a space-saving benchtop package. Ease-of-use and coating speed are built in for routine preparation of TEM/SEM samples (e.g., with sputtering of gold and/or carbon), but with high-end components and compatibility with conventional targets, the possibilities are endless.
Key features:
- Electron microscopy and research- grade coating
- Compact, benchtop unit
- SEM stub/TEM grid/wafer supports
- Up to 2 × 2” magnetron sputtering sources
- Industry- standard sputtering targets
- Turbomolecular pumping to <5 × 10- 7 mbar
- MFC- controlled process gas
- Variable output DC power supply, up to 300 W
- Fully automatic, recipe operation via touchscreen HMI
- Equipped for easy servicing
- Comprehensive safety features
- Cleanroom compatible
- Proven performance
Options:
Available options include:
- Chamber viewports
- Backing pump only
- Dry pumping
- Automatic pressure control
- Shutter
- Plasma glow electrode
- Stage rotation and tilt
- Quartz crystal sensor head process monitoring
System requirements:
All nanoEM systems require chilled water, dry compressed air, nitrogen for venting (optional), process gas (Ar), and electrical power.
Exact requirements will be provided with quotations or on request.